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This work investigates the effects of high-energy neutrons and γ-rays on multiple-gate FETs with different geometries (notably gate lengths down to 50 nm). The impact of radiation on device behavior is addressed through the variation of parameters such as threshold voltage, subthreshold slope, transconductance maximum and DIBL. It is shown that degradations caused by γ-rays and high-energy neutrons with similar doses are largely similar. It is revealed that, on the contrary to the generally-believed immunity to irradiation, very short-channel FinFETs can become extremely sensitive to the total dose effect. The possible reasons are discussed. [ABSTRACT FROM AUTHOR]

Abstract: This paper investigates, for the first time, the influence of high-energy neutrons on Multiple-Gate FETs (MuGFETs) with various gate lengths and fin widths. Neutron-induced degradation is addressed through the variation of major device parameters such as threshold voltage, subthreshold slope, maximum transconductance and DIBL. We demonstrate that high-energy neutrons result in total-dose effects largely similar to those caused by γ- and proton-irradiations. It is shown that, contrarily to the generally-believed immunity to irradiation, very short-channel MuGFETs can become extremely sensitive to the total-dose effect. The possible reasons of such length-dependent neutron-induced degradation are discussed and finally related to gate edges. [Copyright &y& Elsevier]