1. Study of Complex Waveguide Structure using Soft X-ray Reflectivity Technique.
- Author
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Singh, Amol, Modi, Mohammed H., Dhawan, R., Jonnard, P., Le Guen, K., and André, J.-M.
- Subjects
WAVEGUIDES ,SOFT X rays ,REFLECTANCE ,GRAZING incidence ,LAYER structure (Solids) ,SUBSTRATES (Materials science) - Abstract
Grazing incidence x-ray reflectivity (GIXRR) technique is commonly used for structural investigation of layered structures. In case of complex x-ray waveguide structure it is difficult to obtain structural parameters using GIXRR technique owing to narrowly spaced Kiessig fringes. We used GIXRR and soft x-ray reflectivity (SXR) technique to study the x-ray waveguide structure composed of 4 layers Al/ZrC/Al/W on a Si substrate. Structural parameters of the stacks, density, thickness and roughness of the layers, are determined through fitting of SXR data. Advantages of SXR over GIXRR for such layered structure are shown. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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