Search

Microelectromechanical system (MEMS) test sockets with attached tips were developed for a ball-grid-array integrated circuit (BGA IC) package, using MEMS fabrication technology in conjunction with Ni-Co electroplating and XeF isotropic silicon etching. The electroplating process was used to create metal tips and thick metal cantilevers, which increased the contact reliability and conductivity. XeF isotropic silicon etching was used to release the cantilever array, which reduced the process cost and increased the mechanical stability. A finite element analysis (FEA) simulation was conducted to verify the force-deflection relationships of five types of cantilevers with attached tips. With an input deflection of 40 μm, the measured forces ranged from 12.55 to 26.14 mN, and matched the FEA results. The path resistance between a tip and the appropriate electrode pad was less than 3.49 Ω for all cantilevers when the tips were connected to the corresponding positions with more than 5 mN of contact force. The cantilever design with a length of 430 um and a tip height of 60 um (L430D60) showed the best performance in terms of the force-deflection relationship, a well as resistance. Therefore, the fabricated MEMS test sockets with tips are potentially applicable to actual BGA IC package tests. [ABSTRACT FROM AUTHOR]

Abstract: In this study, influence of coating chemistry, channel width and tortuosity of various two-dimensional micro-channels were explored on micromachined Si using osteoblast precursor cells line 1 (OPC1). The rationale for our study is to delineate the influence of different porosity parameters on bone cell attachment and proliferation in vitro. Channel widths of 100, 200, 300, 400, and 600μm; channel bends of 0, 1, and 2 right angles; and gold and silicon dioxide coatings on single-crystal Si were studied. Experiments were conducted with channel tops under glass covered and uncovered conditions keeping the channel depth at 220μm. Independent samples were evaluated using SEM imaging and MTT assay to measure bone cell morphology and quantity. Images were taken of micro-channels and exterior chambers at 50×, 500×, 1000×, and 5000× magnifications. Channel and chamber cell densities were scored as follows: bare (score=0), scattered (1), limited (2), abundant (3), and overflowing (4). Samples were then scored and statistically analyzed for major differences. In general, OPC1 cells proliferated at least 5% or better based on cell numbers under uncovered conditions than glass covered. Channel widths of 100μm largely prohibited cell proliferation and diffusion by narrow path inhibition with the lowest average score of 1.17. Among channel bends of 0, 1, and 2 right angles, an increase in micro-channel tortuosity from 0–2 bends amplified OPC1 cell growth upwards of ~6.6%. A one-way ANOVA showed significant differences in cell quantity for alternating channel tortuosity at a significance level of p <0.05. No preference was found for gold or silicon dioxide coatings on Si for bone cell proliferation. [Copyright &y& Elsevier]

This research focuses on the development of a flexible tactile sensor array consisting of aluminum nitride (AlN) based on micro-electro-mechanical system (MEMS) technology. A total of 2304 tactile sensors were integrated into a small area of 2.5 × 2.5 cm2. Five hundred nm thick AlN film with strong c-axis texture was sputtered on Cr/Au/Cr (50/50/5 nm) layers as the sacrificial layer coated on a Si wafer. To achieve device flexibility, polydimethylsiloxane (PDMS) polymer and SU-8 photoresist layer were used as the supporting layers after etching away a release layer. Twenty-five mM (3-mercaptopropyl) trimethoxysilane (MPTMS) improves the adhesion between metal and polymers due to formation of a self-assembled monolayer (SAM) on the surface of the top electrode. The flexible tactile sensor has 8 × 8 channels and each channel has 36 sensor elements with nine SU-8 bump blocks. The tactile sensor array was demonstrated to be flexible by bending 90 degrees. The tactile sensor array was demonstrated to show clear spatial resolution through detecting the distinct electrical response of each channel under local mechanical stimulus. [ABSTRACT FROM AUTHOR]

We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92-12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs. [ABSTRACT FROM AUTHOR]

Abstract: We demonstrated a novel MEMS artificial basilar membrane composed of a piezoelectric beam array that mimics the passive frequency selectivity of the cochlea and exhibits acoustic-to-electrical energy conversion. Each beam was designed to have a unique resonance frequency. To determine the resonance frequencies of the beams, the displacement and piezoelectric voltage were measured by applying a periodic chirped signal with a sound pressure level of 109.7dB. The measured resonance frequencies were in the range 10–37kHz. The piezoelectric signal was used to modulate a finite pulse-width signal for electrical stimulation; the pulse widths were in the range 0.43–5.1ms with sound pressure levels in the range 84.9–112.4dB. [Copyright &y& Elsevier]

• A piezoelectric MEMS vector sensor with a cross-shaped beam and a mushroom-shaped mass was fabricated. • The crossed-shaped beam has well deposited piezoelectric thin film. • The directivity of the sensor was mechanically characterized from dipole patterns in x- and y -directions. • Finite element analysis was performed with air and underwater conditions to determine the dipole pattern. [Display omitted] Vector hydrophones based on a micro-electro-mechanical system (MEMS) hold great promise for underwater communications, due to their potential for miniaturization and mass production. Piezoelectric materials have recently been utilized in the fabrication of MEMS-based vector hydrophones, as less power is typically required for their operation. Here, we propose a millimeter-scale piezoelectric MEMS vector sensor with a suspended cross-shaped beam and a mushroom-shaped proof mass configuration. This design was inspired by the bio-transducer of the lateral line of fish. Sensor fabrication involved piezoelectric Pb(Zr 0.52 Ti 0.48)O 3 thin-film deposition by radio-frequency magnetron sputtering onto the beam structure, followed by a multi-etching process and assembly using a three-axis microassembly technique. The fabricated MEMS vector sensor showed a resonance frequency above the working frequency range, which was suitable for naval applications. The directivity of the proposed sensor was determined by dipole patterns in the x and y directions, with a maximum relative sensitivity difference of −42 dB at 1 kHz. Finite element analysis results for the resonance frequency and directivity were in good agreement with the experimental results, suggesting that the proposed vector sensor could be used in underwater communications as a vector hydrophone. [ABSTRACT FROM AUTHOR]