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Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability'point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

The atomic force microscope (AFM) has been successfully used to perform nanorobotic manipulation operations on nanoscale entities such as particles, nanotubes, nanowires, nanocrystals, and DNA since 1990s. There have been many progress on modeling, imaging, teleoperated or automated control, human-machine interfacing, instrumentation, and applications of AFM based nanorobotic manipulation systems in literature. This book aims to include all of such state-of-the-art progress in an organized, structured, and detailed manner as a reference book and also potentially a textbook in nanorobotics and any other nanoscale dynamics, systems and controls related research and education. Clearly written and well-organized, this text introduces designs and prototypes of the nanorobotic systems in detail with innovative principles of three-dimensional manipulation force microscopy and parallel imaging/manipulation force microscopy.

Microfluidic Technologies for Miniaturized Analysis Systems provides a comprehensive overview of the fluidic aspects of Lab-on-a-Chip technology. This book describes the most important and state-of-the-art microfluidic technologies and the underlying principles utilized in the implementation of fluidic protocols of miniaturized analysis systems. This book discusses many of the effects, outcomes, and techniques which are unique to microfluidic systems. The specific components of this technology toolbox are elucidated through research and examples presented by some of the most renowned experts in the field. Microfluidic Technologies for Miniaturized Analysis Systems is an important reference for professionals and academic researchers seeking information about the latest techniques, including: Control and pumping of small amounts of liquid Particle and cell manipulation Micromixing Separation technology Bioanalytic methods About the MEMS Reference Shelf:The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. This series strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner.STEPHEN D. SENTURIA, MASSACHUSETTS INSTITUTE OF TECHNOLOGY,PROFESSOR OF ELECTRICAL ENGINEERING, EMERITUS