1. Single Metal Oxide Nanowire devices for Ammonia and Other Gases Detection in Humid Atmosphere.
- Author
-
Donarelli, M., Ferroni, M., Ponzoni, A., Rigoni, F., Zappa, D., Baratto, C., Faglia, G., Comini, E., and Sberveglieri, G.
- Subjects
METALLIC oxides ,GAS detectors ,HUMIDITY ,SUBSTRATES (Materials science) ,ELECTRON beam lithography - Abstract
Metal oxide nanowires have been deposited on 100nm SiO 2 /Si substrates and SnO 2 and ZnO single nanowire devices have been fabricated by electron beam lithography technique. Gas sensing tests have been carried out, in order to detect ammonia, CO and NO 2 under standard humidity conditions. The devices have been also tested in either dark condition or exposed to ultraviolet light at room temperature. SnO 2 nanowires are able to detect ammonia at concentration of the order of few ppm also in dark conditions, they are sensitive to NO 2 and cannot detect CO. ZnO devices show good sensitivity to 5ppm of ammonia in 30% relative humidity atmosphere. The samples have been mounted on a TO-39 case in a field effect transistor configuration in order to study the influence of the back-gate voltage on the single nanowire devices gas sensing performances. [ABSTRACT FROM AUTHOR]
- Published
- 2016
- Full Text
- View/download PDF