Search

This study aims to obtain safe working condition of the electrothermal U-shaped actuator (EUA). The finite difference method is applied for modeling and solving the steady electric-thermal state and maximum temperature of the microactuator. The critical voltages causing beam buckling and overheating phenomena are determined to avoid the axial instability as well as melting deformation of the actuator. The relationships between temperature and the frequency or amplitude of the AC are analyzed. The results showed that the structure and the applied voltage levels have significant influence on the temperature distributions and the value of the stress. It is confirmed that the temperature between 300 to 600 °C is comparatively suitable for microactuator according to theoretical and experimental analysis, and the microactuator is able to provide accurate and stable number of cycles for tens of millions. [ABSTRACT FROM AUTHOR]

Optical devices are frequently being used in medical applications to image lesions and malignancies, and to assist with surgical procedures. The advances in micro-electro-mechanical systems (MEMSs) and optics led to the fabrication of flexible endoscopes as small as a few millimeters in diameter. The design of a sub-millimeter sized optical fiber scanner is presented in this paper. The proposed scanner consisted of a vibrating optical fiber that carried the laser light to the targeted imaging sample. The desired vibratory motion of the scanning device was obtained using a U-shaped electrothermal actuator where the asymmetry in the actuator’s arm length caused the free end of the actuating device to bend allowing a bidirectional motion at its free end. The periodic square current wave passing through the actuator caused it to bend in a timely manner. By matching the signal frequency to the resonant frequency of the cantilever fiber and placing the cantilever appropriately relative to the actuator, the distal end of the fiber was allowed to follow a Lissajous scan. In optical scanners, the Lissajous scan pattern is normally obtained using a pair of actuators. This paper presents the design of a scanner providing a 2D Lissajous scan using a single actuator. Such a technique can provide basis for the development of sub-millimeter sized forward-viewing endoscopic catheters, whereas the smallest single fiber endoscope has a diameter of 1.2 mm. In the medical field, such a device has the potential to image small cavities of the body increasing the diagnostic yield of the medical procedures.

A safety and arming device with a condition feedback function has been designed in this article to improve the intelligence and safety of ignition devices. The device achieves active control and recoverability by virtue of four groups of bistable mechanisms which consist of two electrothermal actuators to drive a semi-circular barrier and a pawl. According to a specific operation sequence, the barrier is engaged by the pawl at the safety or the arming position. The four groups of bistable mechanisms are connected in parallel, and the device detects the contact resistance generated by the engagement of the barrier and pawl by the voltage division of an external resistor to determine the parallel number of the mechanism and give feedback on the device's condition. The pawl as a safety lock can restrain the in-plane deformation of the barrier in the safety condition to improve the safety function of the device. An igniter (a NiCr bridge foil covered with different thicknesses of Al/CuO films) and boron/potassium nitrate (B/KNO3, BPN) are assembled on both sides of the S&A device to verify the safety of the barrier. The test results show that the S&A device with a safety lock can realize the safety and arming functions when the thickness of the Al/CuO film is set to 80 μm and 100 μm. [ABSTRACT FROM AUTHOR]

Optical scanners are used frequently in medical imaging units to examine and diagnose cancers, assist with surgeries, and detect lesions and malignancies. The continuous growth in optics along with the use of optical fibers enables fabrication of imaging devices as small as a few millimeters in diameter. Most forward viewing endoscopic scanners contain an optical fiber acting as cantilever which is vibrated at resonance. In many cases, more than one actuating element is used to vibrate the optical fiber in two directions giving a 2D scan. In this paper, it is proposed to excite the cantilever fiber using a single actuator and scan a 2D region from its vibrating tip. An electrothermal actuator is optimized to provide a bidirectional (horizontal and vertical) displacement to the cantilever fiber placed on it. A periodic current, having a frequency equal to the resonant frequency of cantilever fiber, was passed through the actuator. The continuous expansion and contraction of the actuator enabled the free end of fiber to vibrate in a circle like pattern. A small change in the actuation frequency permitted the scanning of the area inside the circle. [ABSTRACT FROM AUTHOR]

A safety and arming device with a condition feedback function has been designed in this article to improve the intelligence and safety of ignition devices. The device achieves active control and recoverability by virtue of four groups of bistable mechanisms which consist of two electrothermal actuators to drive a semi-circular barrier and a pawl. According to a specific operation sequence, the barrier is engaged by the pawl at the safety or the arming position. The four groups of bistable mechanisms are connected in parallel, and the device detects the contact resistance generated by the engagement of the barrier and pawl by the voltage division of an external resistor to determine the parallel number of the mechanism and give feedback on the device’s condition. The pawl as a safety lock can restrain the in-plane deformation of the barrier in the safety condition to improve the safety function of the device. An igniter (a NiCr bridge foil covered with different thicknesses of Al/CuO films) and boron/potassium nitrate (B/KNO3, BPN) are assembled on both sides of the S&A device to verify the safety of the barrier. The test results show that the S&A device with a safety lock can realize the safety and arming functions when the thickness of the Al/CuO film is set to 80 μm and 100 μm.

Optical scanners are used frequently in medical imaging units to examine and diagnose cancers, assist with surgeries, and detect lesions and malignancies. The continuous growth in optics along with the use of optical fibers enables fabrication of imaging devices as small as a few millimeters in diameter. Most forward viewing endoscopic scanners contain an optical fiber acting as cantilever which is vibrated at resonance. In many cases, more than one actuating element is used to vibrate the optical fiber in two directions giving a 2D scan. In this paper, it is proposed to excite the cantilever fiber using a single actuator and scan a 2D region from its vibrating tip. An electrothermal actuator is optimized to provide a bidirectional (horizontal and vertical) displacement to the cantilever fiber placed on it. A periodic current, having a frequency equal to the resonant frequency of cantilever fiber, was passed through the actuator. The continuous expansion and contraction of the actuator enabled the free end of fiber to vibrate in a circle like pattern. A small change in the actuation frequency permitted the scanning of the area inside the circle.

Rotational rheometers are used to measure paste properties, but the test would take too long to be useful for quality control (QC) on the job site. In this paper, a new type of rheometer is proposed based on a one degree of freedom (DOF) micro-electro-mechanical systems (MEMS)-based motion stage. Preliminary data will be presented to show the capability of the system to measure the viscoelastic properties of a paste. The parallel plate geometry rheometer consists of two plates, which move relative to each other to apply a strain to the material to be tested. From the stress measured and the strain applied, the rheological characteristics of the material can be calculated. The new device consists of an electrothermal actuator and a motion plate. For the rheological measurements, the device is designed to generate the shear stress up to 60 Pa and maintain its stiffness to less than 44 N/m. With these features, the device uses a square plate of 1.5 mm x 1.5 mm to provide enough area for a few microliter level volumes. The motion of the square plate is monitored by a capacitive sensor at the end of the oscillating plate which has a resolution of 1.06 µm. When a reference cementitious paste, Standard Reference Material (SRM)-2492, is placed between the oscillating plate of the presented motion stage and a fixed plate, the reduction in the displacement of the oscillating plate is monitored showing that the presented motion stage is reasonably designed to detect the response of the reference cementitious paste.

The goal of this study was to measure the mechanical stiffness of individual cells and to observe changes due to the application of repeated cell mechanical loads. 28 single baker's yeast cells ( Saccharomyces cerevisiae) were fatigue tested and had their stiffness measured during repetitive loading cycles performed by a MEMS squeezer in aqueous media. Electrothermal micro-actuators compressed individual cells against a reference back spring; cell and spring motions were measured using a FFT image analysis technique with ~10 nm resolution. Cell stiffness was calculated based on measurements of cell elongation vs. applied force which resulted in stiffness values in the 2-10 N/m range. The effect of increased force was studied for cells mechanically cycled 37 times. Cell stiffness decreased as the force and the cycle number increased. After 37 loading cycles (~4 min), forces of 0.24, 0.29, 0.31, and 0.33 μN caused stiffness drops of 5%, 13%, 31% and 41% respectively. Cells force was then set to 0.29 μN and cells were tested over longer runs of 118 and 268 cycles. After 118 cycles (~12 min) cells experienced an average stiffness drop of 68%. After 268 cycles (~25 min) cells had a stiffness drop of 77%, and appeared to reach a stiffness plateau of 20-25% of the initial stiffness after approximately 200 cycles. [ABSTRACT FROM AUTHOR]

The design and fabrication of an electrothermal MEMS actuation structure which is capable of producing large out-of-plane deflection is presented. The actuators are used to move a 1 mm2 mirror structure, where the large deflection allows one to achieve large beam steering angles. The electrothermal actuators are designed to operate via joule heating with a monolithically integrated heater. The proposed design was analyzed using finite element method simulation software (COMSOL 5.3a), to determine the thickness of each material layer, the initial out-of-plane upward deflections, the configuration of the heating element to achieve the desired actuation deformations, and the overall steady-state temperature distribution through the actuation structure due to Joule heating. Finally, the actuation assemblies were fabricated, released, tested and compared with our simulation results.

Photonic packaging, which includes high-precision assembly of photonic sub-systems, is currently a bottleneck in the development of commercially-available integrated photonic products. In the pursuit of a fully-automated, high-precision, and cost-effective photonic alignment scheme for two multi-channel photonic chips, this paper explores different designs of the on-chip electrothermal actuators for positioning mechanically-flexible waveguide structures. The final alignment goal is ∼100 nm waveguide to waveguide. The on-chip actuators, particularly for out-of-plane actuation, are built in a 16 μm-thick SiO 2 photonic-material stack with 5 μm-thick poly-Si as an electrothermal element. A major challenge of out-of-plane positioning is a 6 μm height difference of the waveguides to be aligned, due to different built-up material stacks, together with a misalignment tolerance of 1 μm–2 μm from the pre-assembly (flip-chip) process. Therefore, the bimorph-actuator design needs to compensate this height difference, and provide sufficient motion to align the waveguides. We propose to exploit the post-release deformation of so-called short-loop bimorph actuator designs to meet these joint demands. We explore different design variants based on the heater location and the integration of actuator beams with waveguide beams. The actuator design (with 30 μm poly-Si and 900 μm SiO 2 in length) has ∼8 μm out-of-plane deflection and is able to generate ∼4 μm motion, which meets the design goal.

MEMS scanners are useful for medical applications as optical coherence tomography and laser microsurgery. Although widespread design of MEMS scanners have been presented, their behavior is not well known, and thus, their motions are not easily and efficiently controlled. This deficiency induces several difficulties (limited resolution, accuracy, cycle time, etc.), and to tackle this problem, this article presents the modeling of an ISC electrothermally actuated MEMS mirror and the experimental characterization for the piston motion. Modeling and characterization are important to implement the control. A multiphysic model is proposed, and an experimental validation is performed with a good correspondence for a voltage range from 0 V to 3.5 V with a maximum displacement up to 200 µm and with a relative tilting difference of 0.1°. The article also presents a simple and efficient experimental setup to measure a displacement in dynamic and static mode, or a mirror plane tilting in static mode. [ABSTRACT FROM AUTHOR]

Photonic packaging, which includes high-precision assembly of photonic sub-systems, is currently a bottleneck in the development of commercially-available integrated photonic products. In the pursuit of a fully-automated, high-precision, and cost-effective photonic alignment scheme for two multi-channel photonic chips, this paper explores different designs of the on-chip electrothermal actuators for positioning mechanically-flexible waveguide structures. The final alignment goal is ∼100 nm waveguide to waveguide. The on-chip actuators, particularly for out-of-plane actuation, are built in a 16 μm-thick SiO 2 photonic-material stack with 5 μm-thick poly-Si as an electrothermal element. A major challenge of out-of-plane positioning is a 6 μm height difference of the waveguides to be aligned, due to different built-up material stacks, together with a misalignment tolerance of 1 μm–2 μm from the pre-assembly (flip-chip) process. Therefore, the bimorph-actuator design needs to compensate this height difference, and provide sufficient motion to align the waveguides. We propose to exploit the post-release deformation of so-called short-loop bimorph actuator designs to meet these joint demands. We explore different design variants based on the heater location and the integration of actuator beams with waveguide beams. The actuator design (with 30 μm poly-Si and 900 μm SiO 2 in length) has ∼8 μm out-of-plane deflection and is able to generate ∼4 μm motion, which meets the design goal. [ABSTRACT FROM AUTHOR]