1. Voltage-Controlled Mechanical Oscillator Based on Superconducting Membrane
- Author
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Ya-Peng Lu, Jun-Liang Jiang, Peiheng Wu, Guozhu Sun, Huabing Wang, Zi-Shuo Li, Jiazheng Pan, Yongchao Li, Sheng Lu, and Xing-Yu Wei
- Subjects
Superconductivity ,Fabrication ,Materials science ,business.industry ,Photoresist ,Condensed Matter Physics ,Computer Science::Other ,Electronic, Optical and Magnetic Materials ,law.invention ,Capacitor ,law ,Hybrid system ,Qubit ,Optoelectronics ,Electrical and Electronic Engineering ,business ,Microwave ,Voltage - Abstract
Mechanical oscillators can be implemented to store and transfer information or to build hybrid systems. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor, in which diluted photoresist or electron beam photoresist is used as sacrificial layers. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillators can be used as the capacitor of a superconducting qubit to form a coupled system. In order to control the resonant frequency of the mechanical oscillator and the microwave resonator, we introduce a dc voltage bias between the upper and lower plates of the capacitor. We analyze the electromechanical coupling such as pull-in effect and experimentally demonstrate the dependence of the resonant frequency on the applied dc voltage. These results will contribute to the design and fabrication of hybrid systems comprising voltage-controlled mechanical oscillators and other systems.
- Published
- 2020
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