1. Co-precipitation of copper and nickel in crystalline silicon
- Author
-
Rudolf, C., Saring, P., Stolze, L., and Seibt, M.
- Subjects
- *
PRECIPITATION (Chemistry) , *COPPER , *NICKEL , *IMPURITY distribution in semiconductors , *SEMICONDUCTOR wafers , *TERNARY phase diagrams , *TRANSMISSION electron microscopy , *MATERIALS science - Abstract
Abstract: Co-precipitation of copper and nickel in silicon bicrystals produced by wafer-bonding has been investigated. Transmission electron microscopy and energy-dispersive X-ray analysis show two types of precipitates: copper-rich silicide particles that contain a small partial mole fraction of 5% of nickel and nickel-rich particles containing a partial mole fraction between 15% and 25% of copper. Both types of precipitates are found inside large precipitate colonies typical for copper precipitation in silicon in the absence of nickel co-doping. Thermodynamically these precipitates can be assigned to the known binary metal silicide phases Cu3Si and NiSi2 and a solid solution of a second metal species therein. [Copyright &y& Elsevier]
- Published
- 2009
- Full Text
- View/download PDF