1. Key parameters affecting STT-MRAM switching efficiency and improved device performance of 400°C-compatible p-MTJs
- Author
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Nathan P. Marchack, E. R. Evarts, Philip L. Trouilloud, Gen P. Lauer, B. Doris, Thitima Suwannasiri, Qing He, E. J. O'Sullivan, Daniel C. Worledge, S. L. Brown, Jonathan Z. Sun, D. Edelstein, Matthias Georg Gottwald, B. Khan, R. P. Robertazzi, Y. Zhu, Pouya Hashemi, J.H. Park, Guohan Hu, M. Reuter, Janusz J. Nowak, Kothandaraman Chandrasekharan, and Yohan Kim
- Subjects
010302 applied physics ,Magnetoresistive random-access memory ,Materials science ,Perpendicular magnetic anisotropy ,Annealing (metallurgy) ,business.industry ,02 engineering and technology ,Blanket ,021001 nanoscience & nanotechnology ,01 natural sciences ,Magnetomechanical effects ,Tunnel magnetoresistance ,0103 physical sciences ,Perpendicular ,Optoelectronics ,Damping constant ,0210 nano-technology ,business - Abstract
We report the impact of four key parameters on switching efficiency of STT-MRAM devices with perpendicular magnetic anisotropy: device size, device resistance-area product (RA), blanket film Gilbert damping constant (a), and process temperature. Performance degradation observed in 400°C-processed devices was eliminated by optimizing the perpendicular magnetic tunnel junction (p-MTJ) materials. Furthermore, 400°C-compatible double MTJs were developed for the first time and showed 1.5x improvement in switching efficiency compared to single MTJs with identical free layers.
- Published
- 2017
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