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Flexible electronics has emerged as a standalone field and matured over past decades.1–6 This alternative formulation of electronics offers the unique possibility to adjust the shape of devices at will after their fabrication. The flexibility provides vast advantages over conventional rigid electronics; flexible printed circuit (FPC) boards have become an industrial standard for consumer electronics and medical implants,7–10 where large area, extreme thinness, and compliance to curved surfaces are the key requirements for the functional passive and active elements. Flexible devices strongly benefited from the recent developments of organic6,11,12 as well as inorganic10,13,14 electronics, which are prepared using printing and/or thin film technologies. Being synergetically combined with either inkjet, screen, or dispenser printing approaches, flexible electronics has witnessed fascinating innovations in several application areas including displays,15 organic light-emitting diodes,16 various types of sensors,17–21 radio frequency identification tags,22–24 and organic solar cells.25

The time-resolved oxygen exchange rate of strontium titanate (SrTiO3) single crystals is studied by means of oxygen solid electrolyte coulometry (OSEC) and compared to model calculations. Experiments are performed on pure, ion implanted (Ni, Ag, O and N ions) and partially covered crystals with silver layer. In this work, a theoretical model is used, which is based on defect chemistry under equilibrium conditions. It is applied as a fit in order to determine the effective rate constants and activation energy of the oxygen exchange reaction on the crystal surface. OSEC is used for the first time to characterize kinetic parameters of oxygen exchange on single crystalline surfaces. Transmission electron microscopy and sputter X-ray photoelectron spectroscopy are performed to determine structural and chemical changes after ion implantation.