1. Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
- Author
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Shaul Aloni, Giuseppe Calafiore, Jacopo Pedrini, Adam M. Schwartzberg, E. Ashley Gaulding, Stefano Cabrini, Scott Dhuey, Christopher T. Chen, Tevye Kuykendall, Francesca M. Toma, Christoph Kastl, Chen, C, Pedrini, J, Gaulding, E, Kastl, C, Calafiore, G, Dhuey, S, Kuykendall, T, Cabrini, S, Toma, F, Aloni, S, and Schwartzberg, A
- Subjects
0301 basic medicine ,Materials science ,lcsh:Medicine ,Article ,03 medical and health sciences ,Atomic layer deposition ,0302 clinical medicine ,Etching (microfabrication) ,Thin film ,lcsh:Science ,Photonic crystal ,photonic ,conformal coating ,Multidisciplinary ,business.industry ,High-refractive-index polymer ,Conformal coating ,lcsh:R ,transition metal dichalcogenide ,Other Physical Sciences ,030104 developmental biology ,atomic layer deposition ,Optoelectronics ,lcsh:Q ,Biochemistry and Cell Biology ,Photonics ,business ,Single crystal ,030217 neurology & neurosurgery - Abstract
Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS2 layers by chemical conversion of WO3 synthesized via atomic layer deposition (ALD). These conformal nanocrystalline thin films demonstrate a surprisingly high index of refraction (n > 3.9), and structural fidelity compatible with lithographically defined features down to ~10 nm. Although this process yields highly polycrystalline films, the optical constants are in agreement with those reported for single crystal bulk WS2. Subsequently, we demonstrate three photonic structures - first, a two-dimensional hole array made possible by patterning and etching an ALD WO3 thin film before conversion, second, an analogue of the 2D hole array first patterned into fused silica before conformal coating and conversion, and third, a three-dimensional inverse opal photonic crystal made by conformal coating of a self-assembled polystyrene bead template. These results can be trivially extended to other transition metal dichalcogenides, thus opening new opportunities for photonic devices based on high refractive index materials.
- Published
- 2019
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