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The Nikon Metrology Laser Radar system focuses a beam from a fiber to a target object and receives the light scattered from the target through the same fiber. The system can, among other things, make highly accurate measurements of the position of a tooling ball by locating the angular position of peak signal quality, which is related to the fiber coupling efficiency. This article explores the relationship between fiber coupling efficiency and focus condition.

This excerpt gives a succinct explanation of the reflectance and transmittance of thin films.

This excerpt gives a succinct explanation of Fresnel diffraction between confocal surfaces.

Typical focus sensors in conventional integrated circuit lithographic equipment have long been known to exhibit errors due to the nature of patterns printed on the wafer. One such error can be characterized as being derived from thin film effects where the derivative of the phase on reflection by the wafer introduces a shift in the beam that is basically identical to a shift that would be generated by a change in wafer height. In this paper we present a theoretical investigation into the nature and magnitude of the focus offset produced by this wafer effect under current typical process parameters.

Rapid growth in the contact lens industry towards higher levels of customization has precipitated the need for advances in the metrology techniques and instrumentation used to evaluate soft contact lenses. By measuring the transmitted wavefront, the information needed to evaluate a wide range of lens types (spherical, toric, bifocal) is obtained. A Mach-Zehnder interferometer is used with the lenses tested in saline solution. The lenses must be tested in saline solution to prevent dehydration of the lens, which results in an index change. The lenses are mounted in a cuvette, or water cell, that circulates fresh saline. Calibration of the instrument is complicated by the aspheric wavefronts produced by the lenses and the inherent aberrations picked up by the wavefront as it is imaged from immediately behind the lens to the detector. Simply removing a baseline, no test optic measurement from the measured wavefront does not satisfactorily remove the induced aberrations. Instead, removal of the induced aberrations is achieved by reverse raytracing. In reverse raytracing, the wavefront at the detector is traced back through the system to immediately behind the lens. The use of raytracing code enables theoretical wavefronts to be generated and expected-to-calculated performance evaluations to be made at the transmitted wavefront level.