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氧化铟锡(ITO)是薄膜晶体管工艺中最常用的透明导电薄膜,随着OLED技术的发展,ITO作为透明阳极材料也被广泛应用.在高厚度(尤其是大于70 nm)非晶ITO工艺过程中,由于多种因素的影响,很容易产生残留,发生残留后会严重影响产品质量和项目进度.本文通过多次实验测试,综合多种不同厚度,尤其是针对高厚度非晶ITO,分析了TFT制程中影响残留的多种因素,考察重点因素及影响规律,有效地修正工艺条件,为之后的项目和生产过程提供了很好的参考价值.

To solve the problem of poor roughnesses for heavy curved freeform surfaces in prism processing,a Head Mount Display(HMD) prism with decentered aspheric surfaces was developed.All the optical surfaces of the prism were rotationally symmetrical aspherics,which showed a better processing property as compared with freeform surfaces.A short focal length and a large field of view were obtained by controlling the surface curvatures and tilt angles,and the aberration was corrected by optimizing aspheric coefficients.Experiments show that the HMD prism has an exit pupil of 6 mm and a field of view of 55°.At the frequency of 30 lp/mm,the axial Modulation Transfer Function(MTF) is over 0.2,the off-axial MTF is over 0.1,and the maximum distortion is-5.37%.The test and experiment on the prism demonstrate that the surface roughness has been greatly improved to a lower level for the aspheric surfaces,which avoids the image blurring and improves the performance of visualization.

A high efficient,compact,Refractive / Total internal reflection / Reflective / Refractive(RIXR) collimating system was designed and optimized to collect a wide angle range light to emit the collimating beam with a small divergence angle.Firstly,the surface of the initial structure of the system was calculated according to the edge-ray principle and Simultaneous Multiple Surfaces(SMS) method based on the non-imaging optics theory.Then,the initial structure was optimized by using Zemax optical design software.Finally,the best LED collimating system was successfully designed.According to the results of the design,the semi-diameter of the RIXR collimating system is 20 mm,aspect ratio is 0.25 and its collection angle is 200°.These results indicate that the system can completely collect the light emitted by LED sources.As the root mean square radius of a spot diagram for the edge field(± 3.178°)obtained by the reverse ray tracing is less than 2.1 μm,the edge field shows an excellent focusing effect.Furthermore,when the light absorption loss of the material and reflection loss of the interface are fully considered,the light energy utilization rate is as high as 83.48%.Experiments demonstrate that the RIXR-type collimating system has advantages in a compact structure,high light energy utilization ratio and easy to use.

In order to extend visualized detection to near ultraviolet and near infrared waveband for industrial testing,under the requirement of achromatic and passive thermal design,broad-waveband optical system working in 300～1 100 nm range is designed,and prototype for industrial testing is developed.Inverted telephoto construction is adopted to achieve an enough back focal length,and splitting the optical beams into three is achieved by insetting a coating prisms within the back focal length,near ultraviolet,visual and near infrared are imaged in three beams respectly.Reasonably lens material is chose to realize achromatic design.The system is passive thermal by moving a lens.The designed system has a field-of-view of ±3.5°,the effective focal length,F/#,back focal length and total length is 66.5 mm,3.3 nm,63 mm and 132 mm respectively.The results indicate that all MTF is more than 0.3 at 50 lp/mm,and a good performances is achieved over a temperature range(-10～+50)℃,the image requirement is met.Prototype exhibit excellent resulting during experiment.The system gathers as much information as possible about the detected objects by extending waveband,and a good advantage is exhibited in industrial and agricultural testing.