1. Flexible Magnetoresistive Sensors Designed for Conformal Integration.
- Author
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Gaspar, Joao, Fonseca, Helder, Paz, Elvira, Martins, Marco, Valadeiro, Joao, Cardoso, Susana, Ferreira, Ricardo, and Freitas, Paulo P.
- Subjects
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BENDING (Metalwork) , *FLEXIBLE electronics , *MAGNETIC fields , *MAGNETIC tunnelling , *MAGNETORESISTIVE devices - Abstract
This paper reports on the integration of magnetic tunnel junction (MTJ) sensing devices with magnetoresistance responses above 150% on flexible substrates. The sensors are integrated in a fabrication process based on polyimide materials, and demonstrate sensitivities up to 250~\mu \textV /Oe for bias currents in the 100- \mu \textA range. Assessment of the sensors performance is done under controlled mechanical load conditions, and the magnetoresistance is only slightly affected (1% variation) while sensitivity changes by 7.5% when the bending radii reduce down to 5 mm. The results demonstrate the high potential of the MTJ sensors to be used in applications requiring bending and conforming to non-planar geometries, bringing magnetoelectronic technologies to hard-to-reach regions of space. [ABSTRACT FROM PUBLISHER]
- Published
- 2017
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