1. p-GaN Gate HEMTs With 10.6 V Maximum Gate Drive Voltages by Mg Doping Engineering.
- Author
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Zhou, Guangnan, Zeng, Fanming, Gao, Rongyu, Wang, Qing, Cheng, Kai, Li, Lingqi, Xiang, Peng, Du, Fangzhou, Xia, Guangrui, and Yu, Hongyu
- Subjects
MODULATION-doped field-effect transistors ,THRESHOLD voltage ,CHEMICAL engineering ,CHEMICAL vapor deposition ,STRAY currents ,BREAKDOWN voltage ,ENGINEERING ,ELECTRIC breakdown - Abstract
We present a novel p-gallium nitride (GaN) gate HEMT structure with reduced hole concentration near the Schottky interface by doping engineering in metal-organic chemical vapor deposition (MOCVD), which aims at lowering the electric field across the gate. By employing the additional unintentionally doped GaN (u-GaN) layer, the gate leakage current is suppressed and the gate breakdown voltage is boosted from 10.6 to 14.6 V with negligible influence on the threshold voltage and ON-resistance. A reduced Mg concentration in the u-GaN layer was confirmed by secondary-ion mass spectrometry. Time-dependent gate breakdown measurements reveal that the maximum gate drive voltage increases from 6.2 to 10.6 V for a ten-year lifetime with a 1% gate failure rate, which effectively expands the operating voltage margin of the p-GaN gate HEMTs without any other additional process step. [ABSTRACT FROM AUTHOR]
- Published
- 2022
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