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A sulfur hexafluoride based reactive ion etching process allowing to etch several micron deep holes with diameters of the order of a few microns in lithium niobate is reported. Etching of deep structures with aspect ratios up to 1.5 was made possible through the use of an electroplated nickel mask exhibiting a selectivity as high as 20 with respect to lithium niobate. Several crystallograpic orientations were investigated, although particular interest was paid to Y-axis oriented substrates. Photoresist as well as metal masks were also tested and their selectivity was compared. The influence of process parameters such as applied rf power or operating pressure on the sidewall slope angle of the etched patterns was investigated. The technique has been successfully applied to the fabrication of phononic crystals consisting of periodical arrays of 9 μm diameter, 10 μm deep holes, with a 10 μm period, and presenting sidewall angles as high as 73° etched in Y-axis oriented lithium niobate. [ABSTRACT FROM AUTHOR]

We present an optimization process to improve the rejection ratio in integrated beam combiners by locking the dark fringe and then monitoring its intensity. The method proposed here uses the electro-optic effect of lithium niobate in order to lock the dark fringe and to real-time balance the photometric flux by means of a twostage Mach--Zehnder interferometer waveguide. By applying a control voltage on the output Y-junction, we are able to lock the phase and stay in the dark fringe, while an independent second voltage is applied on the firststage intensity modulator, to finely balance the photometries. We have obtained a rejection ratio of 4600 (36.6 dB) at 3.39 µm in transverse electric polarization, corresponding to 99.98% fringe contrast, and shown that the system can compensate external phase perturbations (a piston variation of 100 nm) up to around 1 kHz. We also show the preliminary results of this process on wide-band modulation, where a contrast of 38% in 3.25- to 3.65-µm spectral range is obtained. These preliminary results on wide-band need to be optimized, in particular, for reducing scattered light of the device at the Y-junction. We expect this active method to be useful in high-contrast interferometry, in particular, for astronomical spatial projects actually under study. [ABSTRACT FROM AUTHOR]

The constant improvement of industrial needs to face modern telecommunication challenges leads to the development of novel transducer principles as alternatives to SAW and BAW solutions. The main technological limits of SAW (short-circuit between electrodes) and BAW (precise thickness control) solutions can be overcome by a new kind of transducer based on periodically poled ferroelectric substrate. The approach proposed in this paper exploits a ridge structure combined with a periodically poled transducer (PPT), allowing for the excitation of highly coupled modes unlike previously published results on planar PPTs. High-aspect-ratio ridges showing micrometer dimensions are achieved by dicing PPT plates with a diamond-tipped saw. An adapted metallization is achieved to excite acoustic modes exhibiting electromechanical coupling in excess of 15% with phase velocities up to 10 000 m?s?1. Theoretical predictions show that these figures may reach values up to 20% and 18 000 m?s?1, respectively, using an appropriate design. [ABSTRACT FROM AUTHOR]

Abstract: We report on two approaches to achieve ultra-smooth structures on lithium niobate (LiNbO3) substrates. The first method relies on ICP-RIE (inductively coupled-reactive ionic etching) or on RIE, and is exploited here for the fabrication of rods with smooth etched surfaces. A series of tests have been performed with fluorine gases. Nanometric rods with 200, 400 or 600nm diameters, with a periodicity of 400, 800 and 1200nm respectively and etched angles close to 68° for the RIE process and 75° for the ICP-RIE process have been fabricated. The second process is based on “optical grade dicing” and is dedicated to the fabrication of deep-etched ridge waveguides. First optical characterization results are reported. They show optical propagation losses value close to 0.1dB/cm. [Copyright &y& Elsevier]