1. Evaluation of ultraviolet-nanoimprint-lithography release agent properties by using TriboIndenter
- Author
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Ian Thomas Clark, Jun Taniguchi, Kota Funakoshi, Toshiro Okawa, Chiharu Tadokoro, and Shinya Sasaki
- Subjects
Materials science ,Substrate (chemistry) ,Adhesion ,Tribology ,Condensed Matter Physics ,Silane ,Atomic and Molecular Physics, and Optics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Nanoimprint lithography ,law.invention ,Contact angle ,Release agent ,chemistry.chemical_compound ,chemistry ,law ,Adhesive ,Electrical and Electronic Engineering ,Composite material - Abstract
Display Omitted We investigated the surface tribological properties of two release agents.The friction and adhesion forces were measured separately.Two kinds of release agents were shown different friction and adhesion forces.Our tribological method of evaluating the properties is shown to be effective. The adhesive and friction forces generated in releasing a mold from a resin in the presence of a release agent was investigated by using a TriboIndenter. We investigated the surface tribological properties of two ultraviolet-nanoimprint-lithography release agents, Optool DSX and trichloro(tridecafluoro-octyl)silane C8H4Cl3F13Si] (F13), to elucidate the mold-release mechanism. For both release agents, we measured the friction and adhesive forces acting on the substrate. The friction force of Optool DSX was found to be lower than that of F13, whereas F13 showed a lower adhesive force than Optool DSX. Our previous results revealed that the durability of Optool DSX as a release agent was better than that of F13. Examining our previous and current results, we saw that the trends in the contact angle and the number of defects with increasing imprinting counts coincide with the trends in the friction and adhesive forces, respectively, of the release agents. Our method of evaluating the surface properties of release agents in two kinds of tests is shown to be effective.
- Published
- 2015
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