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We present a combined 1D imaging and broadband spectroscopy tool for analyzing laser-produced plasma sources of extreme ultraviolet light using a tapered zone plate that is dispersion-matched to a transmission grating. Specifically, we follow up on prior work [Mostafa et al. Opt. Lett. 48, 4316 (2023)] to obtain the actual spectral and spatial resolution of the imaging spectrometer and compare it to the design values. The imaging spectrometer is shown to have a spectral resolution of 1.2 nm at 13.5 nm, close to its design value, by assessing spectra obtained from carbon laser-produced plasma in a 5–180 nm wavelength band. The spatial resolution was obtained by placing slits near the object plane and back-illuminating the slit with a tin laser-produced plasma and found to be 17(5) µm, somewhat larger than the design specifications but still well within design limits for use for diagnosing plasma. [ABSTRACT FROM AUTHOR]

We experimentally characterize the ionic emission, including the individual charge states Snz+ (z = 1 , ... , 8), from laser-produced tin plasma as a function of the intensity of the employed ns-pulsed laser. The plasma is generated in a vacuum from tin microdroplets (diameter ranging from 17 to 35 μm) using pulsed Nd:YAG laser light (laser wavelength λ = 1.064 μm) over a range of intensities (0.4– 40 × 10 10 W/cm2). We measure charge-state-resolved and integrated ion energy distributions at seven angular positions around the plasma using seven retarding field analyzers. We highlight peak features in both types of spectra and describe the dependence of their energies on laser intensity with power-law functions. The resulting power laws match those derived from plasma radiation hydrodynamics theory. The analytical scaling laws exhibit strong isotropy, while the ion energy spectra are highly anisotropic. [ABSTRACT FROM AUTHOR]

We present results from a combined experimental and numerical simulation study of the anisotropy of the expansion of a laser-produced plasma into vacuum. Plasma is generated by nanosecond Nd:YAG laser pulse impact (laser wavelength λ = 1.064 μ m) onto tin microdroplets. Simultaneous measurements of ion kinetic energy distributions at seven angles with respect to the direction of the laser beam reveal strong anisotropic emission characteristics, in close agreement with the predictions of two-dimensional radiation-hydrodynamic simulations. Angle-resolved ion spectral measurements are further shown to provide an accurate prediction of the plasma propulsion of the laser-impacted droplet. [ABSTRACT FROM AUTHOR]

Laser-produced transient tin plasmas are the sources of extreme ultraviolet (EUV) light at 13.5 nm wavelength for next-generation nanolithography, enabling the continued miniaturization of the features on chips. Generating the required EUV light at sufficient power, reliability, and stability presents a formidable multi-faceted task, combining industrial innovations with attractive scientific questions. This topical review presents a contemporary overview of the status of the field, discussing the key processes that govern the dynamics in each step in the process of generating EUV light. Relevant physical processes span over a challenging six orders of magnitude in time scale, ranging from the (sub-)ps and ns time scales of laser-driven atomic plasma processes to the several μs required for the fluid dynamic tin target deformation that is set in motion by them. [ABSTRACT FROM AUTHOR]