Search

The lithographically tunable and small size features of Lamb wave resonators (LWRs) take a bright future for their use in high frequency narrow band filters. Resonant frequency drift due to temperature variation has a large impact on the narrower passband and a temperature coefficient of frequency (TCF) closer to 0 can broaden the stable temperature range of the resonator. This paper proposes a method of etching grooves in the area of the piezoelectric layer not covered by the Interdigital transducer (IDT) electrodes to improve the temperature stability of the Lamb resonator. Through the finite element method and theoretical analysis, the phase velocity, group velocity, and TCF dispersion curve of different modes of the resonator with groove structure were determined. The reason for the change of TCF under different normalized thicknesses of AlN was explained through the conversion of the LWR from a contour mode resonator (CMR) to a Cross-Sectional Lamé Mode Resonator. Simulation and test have shown that etching grooves have the effect of reducing TCF by adjusting the electromechanical coupling coefficient. The test shows that 205 nm-depth grooves can lower the TCF of the S0 mode IDT-Open LWR from −13.3 to −5.1 ppm/°C and S1 mode from −36.8 to −9.0 ppm/°C, respectively. The TCF of S0 and S1 mode LWRs decreased by 61.7% and 75.5%, respectively, after 205 nm groove etching. The groove etching method greatly raises the temperature stability of the LWR, enabling Lamb wave filters to operate stably over a wider temperature range. [ABSTRACT FROM AUTHOR]

The first-order antisymmetric (A1) mode lamb wave resonator (LWR) based on Z-cut LiNbO3 thin films has attracted significant attention and is widely believed to be a candidate for next-generation reconfigurable filters with high frequency and large bandwidth (BW). However, it is challenging for traditional interdigitated electrodes (IDTs) based LWR filters to meet the requirement of a clean frequency spectrum response and enough out-of-band (OoB) rejection. To solve the problem, we propose LWRs with checker-shaped IDTs for the design of filters that meet the Wi-Fi 6E standard. By taking advantage of checker-shaped IDTs with unparalleled boundaries, the fabricated 6-GHz resonators successfully suppress higher-order A1 spurious modes, demonstrating a spurious-free impedance response and a high figure-of-merit (FOM) up to 104. Based on the demonstrated checker-shaped electrode design, the filter features a center frequency (f0) of more than 6 GHz, a 3 dB BW exceeding 620 MHz, and an excellent OoB rejection >25 dB, consistent with the acoustic-electric-electromagnetic (EM) multi-physics simulations. Furthermore, through the capacitance-inductance matching network technology, the filter's voltage standing wave ratio (VSWR) is successfully reduced below 2, showing an excellent 50 Ω impedance matching. This study lays a foundation for ultra-high-frequency and ultra-wideband filters for the Wi-Fi 6/6E application. [ABSTRACT FROM AUTHOR]

The first asymmetric mode (A1 mode) lamb wave resonator (LWR) with a resonant frequency of 6 GHz based on Z-cut lithium niobate (LN) films is presented. An asymmetric electrode structure with different-sized electrode pads in the center and edged regions has been proposed, which can be used to optimize the distribution of the electric field and decrease acoustic impedance mismatch to improve the target mode. Experiment results reveal that LWRs with an asymmetric electrode structure can successfully enhance the A1 mode, achieving a high effective electromechanical coefficient ( k eff 2 ) of 26%, a quality factor (Q) of 1123, and an excellent figure-of-merit (FOM = k eff 2 ∙ Q) of 262. It demonstrates that asymmetric electrode structure provides a new way to suppress the spurious modes for LWRs and shows a great application prospect in wide-bandwidth and low-loss filters used in the sub-6 G frequency range. [ABSTRACT FROM AUTHOR]

High-performance Lamb wave devices have a vast application prospect in modern wireless communication systems. This paper proposes a method of spurious mode suppression by reducing the overlap length of electrodes according to modal shapes. The AlN/Al0.8Sc0.2N composite film is used to achieve a trade-off between electromechanical coupling coefficient (k t 2) and Q factor. The finite-element analysis (FEA) is employed to study the performance of the lowest-order symmetric mode (S0) Lamb wave resonators (LWRs), and the FEA result shows a spurious mode in the impedance response. According to the results of modal shape analysis, the typical LWR, the LWR with the circle-shaped arrangement of electrodes, the LWR with the circle-shaped apodization, and the LWR with the arc-shaped apodization are fabricated to suppress the spurious mode and investigate the performance of the LWRs. The measurement results show that the spurious mode is effectively suppressed over a wide frequency range (1.9–2.2 GHz) by the three designed electrode configurations. The LWR with the circle-shaped apodization working at 2.023 GHz has a Qp factor of 955, a moderate k t 2 of 2.97%, a figure-of-merit (Q × k t 2) of 28.4, and a large value of f × Q × k t 2 (5.773 × 1010). Utilizing modal shapes to design the electrode configuration of LWRs can suppress spurious modes without significant performance deterioration. [ABSTRACT FROM AUTHOR]

Lamb wave resonators (LWRs) exhibiting high-quality factors and clean spectra demonstrate promising applications in RF communication and sensing. This paper discusses the relationship between the spurious mode, the quality factor, and the effective electromechanical coupling factor of resonators. When the resonant frequency of the spurious mode is slightly below the parallel resonant frequency (fp), the quality factor at fp (Qp) decreases dramatically. To enhance Qp and suppress the spurious mode, the LWRs with busbars including only the top electrode (non-overlap busbars) and the LWRs with busbars incorporating both top and bottom electrodes (overlap busbars) are designed and fabricated. The LWR with 12 μm-wide overlap busbars exhibits a notable enhancement in Qp, elevating it from 553.76 to 1488.17 and suppresses the spurious mode simultaneously. This research introduces a promising approach to suppress the spurious mode and enhance the quality factor of Lamb wave resonators, thereby holding great potential for applications in sensors and mobile communication. [ABSTRACT FROM AUTHOR]

Over the past decade, ultraviolet (UV) detection has been a subject of major interest for both research scientists and engineers because of its important applications in both the civil and military fields. The rapid development of interdisciplinary research has enabled the realization of UV detectors based on a variety of principles. Among these devices, UV detectors based on surface acoustic wave (SAW) technology offer unique advantages of remote wireless operation capability and zero power consumption. This article provides a comprehensive review of the working principles, important parameters, and the acoustic wave and materials types used in SAW-based UV detectors. The research and development status of these detectors are discussed and the most commonly used methods to optimize device performance are also summarized. Novel types of acoustic UV detectors based on thin film bulk acoustic resonators (FBARs) and Lamb wave resonators (LMRs) are briefly introduced. Finally, future development challenges are proposed and suggestions for future directions are provided to aid the development of this important research field. [ABSTRACT FROM AUTHOR]