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Abstract: Experimentally observed surface segregation of nickel during Ni:C thin films growth is analyzed by kinetic model. The model is built considering experimental results where microstructure evolution as a function of the substrate temperature and metal content of C:Ni nanocomposite films grown by pulsed filtered cathodic arc deposition is investigated. The kinetic model includes processes of adsorption, chemical diffusion, surface segregation. Chemical diffusion and surface segregation are allowed in a layer near the surface. The experimental depth profile curves taken from literature were fitted by using proposed model. Thereby the values of depth dependent surface segregation and chemical diffusion coefficients are determined in the system. It is shown by modeling that with the increase of temperature the process of nickel surface segregation becomes dominant. [Copyright &y& Elsevier]

In this work analysis considering Ni:C thin films growth on thermaly oxidized Si substrate by proposed kinetic model is presented. Model is built considering experimental results where microstructure evolution as a function of the substrate temperature and metal content of Ni:C nanocomposite films grown by hyperthermal ion deposition is investigated. The proposed kinetic model is based on the rate equations and includes processes of adsorption, surface segregation, diffusion, chemical reactions of constituents. The experimental depth profile curves were fitted by using proposed model. The obtained results show a good agreement with experiment taking into account concentration dependent diffusion. It is shown by modeling that with the increase of substrate temperature the process of nickel surface segregation becomes most important. [ABSTRACT FROM AUTHOR]