The oxidation behaviour of nitride powder under the condition of diffusion controlled has been investigated from both experimental and theoretical aspects. The effects of factors, such as oxidation time t, temperature T, oxygen partial pressure Po2, temperature increasing rate η and particle size R0, on the reacted fraction of oxidation have been studied, in which many factors have never been studied quantitatively before. The applications of the authors' model to both experimental data of AlN, BN and β-SiAlON powder provided by the authors' lab as well as the data of SiAlON and MgAlON powders offered by literature show that this model works well. Finally, after the calculation error comparison, it is clear to show that the authors' new model would lead to a more accurate calculation result against the model used in literatures currently. [ABSTRACT FROM AUTHOR]