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Abstract: Mo-doped In2O3 thin films have been prepared on glass substrates using an activated reactive evaporation method and systematically studied the effect of oxygen partial pressure on the structural, optical, electrical and photoluminescence properties of the films. The obtained films are highly transparent and conductive. The films exhibited the lowest electrical resistivity of 5.2×10−4 Ωcm, with an average optical transmittance of 90% in the visible region. An intensive photoluminescence emission peaks were observed at 415 and 440nm. [Copyright &y& Elsevier]

Abstract: Transparent and high conductive molybdenum doped indium oxide (IMO) thin films have been deposited on glass substrates by activated reactive evaporation. The effect of substrate temperature on the structure, surface morphology, electrical, optical and photoluminescence properties of these films were systematically examined and it was found that crystallinity and growth orientation of the films were significantly influenced by substrate temperature. In addition the films exhibited a low electrical resistivity of 5.2×10−4 Ωcm with an optical transmittance 90% in the visible region of the solar spectrum at a substrate temperature of 573K. Intensive blue PL bands at 415 and 440nm were observed in the photoluminescence spectrum at room temperature. [Copyright &y& Elsevier]