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1. Development of fountain detectors for spectroscopy of secondary electron in SEM.

Author

Agemura, Toshihide, Iwai, Hideo, and Sekiguchi, Takashi

Subjects
*SECONDARY electron emission, *DETECTORS, *SPECTRUM analysis, *SCANNING electron microscopy, *IMAGE processing
Abstract

To image the variation of surface potential in semiconductors, energy selective secondary electron detector, named fountain detector (FD), was developed. Two types of grids, planar and spherical, were designed and the superiority of latter was demonstrated. The p-n junction of 4H-SiC was observed using spherical FD and the image was much clear than that using conventional detector. [ABSTRACT FROM AUTHOR]

Published
2017
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