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This paper mainly studied the electrical performance improvement of black silicon photovoltaic (PV) cells and modules. The electrical performance of the cells and modules matched with black silicon was optimized through three different experiments. Firstly, in the pre-cleaning step, the effect of lotion selection on the cell performance was studied. Compared with alkaline lotion, using acidic lotion on black silicon wafer can achieve an efficiency improvement of the black silicon cell by nearly 0.154%. Secondly, the influence of oxygen flux control of the thermal oxidation step on the improvement of cell efficiency was studied. The addition of the thermal oxidation step and its oxygen flux control resulted in an efficiency increase of the black silicon cell of nearly 0.11%. The most optimized volume control of the oxygen flux is at 2200 standard cubic centimeter per minute (SCCM). Finally, in the module packaging process, the selection of components will also greatly affect the performance of the black silicon PV module. The most reasonable selection of components can increase the output power of the black silicon PV module by 6.13 W. In a word, the technical indication of the electrical performance improvement suggested in this study plays an important guiding role in the actual production process. [ABSTRACT FROM AUTHOR]