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The microstructure and properties of NiTiAlCrN coatings with different N contents were explored by changing the nitrogen-argon flow ratio. The microstructure and morphologies of the coating was characterized and analyzed by X-ray diffractometer(XRD), scanning electron microscope(SEM), energy dispersive spectrometer(EDS). The cavitation experiment was carried out by an ultrasonic vibration cavitation machine. The results show that NiTiAlCrN coating exhibits a face-centered cubic(FCC) structure with preferential orientations on the(111) and(200) crystal planes. With the increase of nitrogen-argon flow ratio, the hardness, elastic modulus and cavitation resistance increased first and then decreased. When the nitrogen-argon flow ratio is 1∶1, the structure of the coating is the densest, the grains are the smallest, the hardness is the highest, and the cavitation resistance is the strongest. When the nitrogen-argon flow ratio is 3∶2, the coating exhibits the largest elastic potential energy and the strongest toughness, but the ability to resist cavitation is lower than that of the coating when the nitrogen-argon flow ratio is 1∶1, which reveals that the hardness has a greater effect on the cavitation resistance of the coating. A large number of oxides of cavitation resistance such as Cr2O3 and Al2O3 were found on the inner wall of the cavitation pit, which alleviated the impact of the micro-jet and further reduced the damage to the coating. [ABSTRACT FROM AUTHOR]

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