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Multimodal hard X-ray scanning probe microscopy has been extensively used to study functional materials providing multiple contrast mechanisms. For instance, combining ptychography with X-ray fluorescence (XRF) microscopy reveals structural and chemical properties simultaneously. While ptychography can achieve diffraction-limited spatial resolution, the resolution of XRF is limited by the X-ray probe size. Here, we develop a machine learning (ML) model to overcome this problem by decoupling the impact of the X-ray probe from the XRF signal. The enhanced spatial resolution was observed for both simulated and experimental XRF data, showing superior performance over the state-of-the-art scanning XRF method with different nano-sized X-ray probes. Enhanced spatial resolutions were also observed for the accompanying XRF tomography reconstructions. Using this probe profile deconvolution with the proposed ML solution to enhance the spatial resolution of XRF microscopy will be broadly applicable across both functional materials and biological imaging with XRF and other related application areas. [ABSTRACT FROM AUTHOR]

B Fabrication of MLL optics. b The MLL optics were fabricated via magnetron sputtering deposition on a silicon substrate and further sectioned by reactive ion etching, followed by focused ion beam (FIB) milling. Discussion and Conclusion The developed monolithic MEMS-based 2D multilayer Laue lens nanofocusing optics significantly simplify the MLLs alignment process and, meanwhile, guarantee the angular and lateral alignment of assembled 2D optics. Keywords: X-ray microscopy; multilayer Laue lenses; optics; MEMS; microfabrication EN X-ray microscopy multilayer Laue lenses optics MEMS microfabrication 28 33 6 11/29/22 20221101 NES 221101 Introduction X-ray microscopy is a powerful characterization tool applied in many scientific fields, such as materials science, environmental science, biology, and energy research [[1]-[4]]. [Extracted from the article]

The ever‐increasing brightness of synchrotron radiation sources demands improved X‐ray optics to utilize their capability for imaging and probing biological cells, nano‐devices and functional matter on the nanometre scale with chemical sensitivity. Hard X‐rays are ideal for high‐resolution imaging and spectroscopic applications owing to their short wavelength, high penetrating power and chemical sensitivity. The penetrating power that makes X‐rays useful for imaging also makes focusing them technologically challenging. Recent developments in layer deposition techniques have enabled the fabrication of a series of highly focusing X‐ray lenses, known as wedged multi‐layer Laue lenses. Improvements to the lens design and fabrication technique demand an accurate, robust, in situ and at‐wavelength characterization method. To this end, a modified form of the speckle tracking wavefront metrology method has been developed. The ptychographic X‐ray speckle tracking method is capable of operating with highly divergent wavefields. A useful by‐product of this method is that it also provides high‐resolution and aberration‐free projection images of extended specimens. Three separate experiments using this method are reported, where the ray path angles have been resolved to within 4 nrad with an imaging resolution of 45 nm (full period). This method does not require a high degree of coherence, making it suitable for laboratory‐based X‐ray sources. Likewise, it is robust to errors in the registered sample positions, making it suitable for X‐ray free‐electron laser facilities, where beam‐pointing fluctuations can be problematic for wavefront metrology. [ABSTRACT FROM AUTHOR]

Multi-modal imaging, which visualizes changes in the structure and chemistry of the same region of interest inmaterials by combining various techniques, is becoming attractive to material scientists. Here, we describe amulti-modal approach to investigate intergranular (IG) corrosion of sensitized stainless steels using synchrotron-based nanoscale X-ray imaging with sensitivity to microstructure and chemical composition. Three-dimensional tomography of 304 stainless steel samples deteriorated by IG corrosion, was carried out using X-ray fluorescence and differential phase contrast imaging. These findings were further supported with surface imaging and chemical analysis using scanning electron microscopy and energy dispersiveX-ray spectroscopy. The combined quantitative structural and chemical analysis indicates that chromium segregates along grain boundaries, cracking is due to IG corrosion, and Cr-enrichment occurs on the cracked surfaces. Such quantitative 3D imaging of Cr23C6 nucleation at grain boundaries and Cr enriched oxides at cracked surfaces is a powerful tool to correlate IG corrosion mechanisms at nanoscale with buried grain boundary structure and alloy composition. Such understanding of IG corrosion mechanisms is critical for both the development of predictive multiscale corrosion models, and the engineering of corrosion resistant materials. [ABSTRACT FROM AUTHOR]

Multilayer Laue lens (MLL) is a new class of x-ray optics that offer great promise for achieving nanometre-level spatial resolution by focusing hard x-rays. Fabricating an MLL via thin-film deposition provides the means to achieve a linear Fresnel-zone plate structure with zone widths below 1 nm, while retaining a virtually limitless aspect ratio. Despite its similarity to the Fresnel-zone plate, MLL exhibits categorically distinctive focusing properties and their fabrication comes with a wide array of challenges. This article provides a comprehensive review of advances in MLLs, and includes extensive theoretical modelling on focusing performance, discussion on fabrication challenges, their current capabilities and notable results from x-ray focusing experiments. [ABSTRACT FROM AUTHOR]