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Start Over Author "Chen, Charlton J." Topic hafnium oxide
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1. Deterministic tuning of slow-light in photonic-crystal waveguides through the C and L bands by atomic layer deposition.

Author

Chen, Charlton J., Husko, Chad A., Meric, Inanc, Shepard, Ken L., Chee Wei Wong, Green, William M. J., Vlasov, Yurii A., and Assefa, Solomon

Subjects
*WAVEGUIDES, *HAFNIUM oxide, *RAMAN effect, *OPTICS, *DISPERSION (Chemistry), *MONOMOLECULAR films, *PHYSICS
Abstract

We demonstrate digital tuning of the slow-light regime in silicon photonic-crystal waveguides by performing atomic layer deposition of hafnium oxide. The high group-index regime was deterministically controlled (redshift of 140±10 pm per atomic layer) without affecting the group-velocity dispersion and third-order dispersion. Additionally, differential tuning of 110±30 pm per monolayer of the slow-light TE-like and TM-like modes was observed. This passive postfabrication process has potential applications including the tuning of chip-scale optical interconnects, as well as Raman and parametric amplification. [ABSTRACT FROM AUTHOR]

Published
2010
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