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1. Three-dimensional concentration profiles of hybrid diffusers in crystalline silicon.

Author

Coffa, S., Privitera, V., Frisina, F., and Priolo, F.

Subjects
ION implantation, GOLD, PLATINUM, ZINC, TRANSITION metals
Abstract

Investigates the diffusion of ion-implanted gold, platinum and zinc in crystalline silicon. Electrical and transport properties of transition metals in crystalline silicon; Consequence of the kick-out mechanism of diffusion for the transition metals; Properties of the three transition metals.

Published
1993
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