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This work presents the investigation on a MEMS based optomechanical transducer for displacements or vibration regarding its cross-sensitivities to multidirectional input excitations. The principle of the optomechanical transducer is based on the modulation of the light flux passing through one static and one movable micromechanical aperture. This kind of transducer is of increasing interest for MEMS sensors since it has inherent benefits and can compete with state-ofthe- art readout concepts regarding its resolution. We have experimentally proven that the sensitivities of the device is 3.3 × 107 V/m in x-direction, 8.23 × 106 V/m in y-direction, while it is negligible in z-direction.

This paper reports a MEMS gradiometer consisting of two independent, laterally oscillating masses on a single chip with integrated optical readout featuring a responsitivity of 35V/T at resonant operation. The symmetrical design of the two masses offers high accuracy and low cost by using conventional MEMS batch fabrication technology. The sensing principle is based on lateral displacement of the masses actuated by Lorentz forces which modulates a light flux passing through a stationary mask and the moving mask integrated in the masses. Phase and intensity detected by photodiodes reveal information about the uniformity of an external applied magnetic field, hence, enables the measurement of gradient-, homogeneous- and offset gradient magnetic fields.

The functional principle of an optical gradient magnetic field sensor consisting of two independent laterally oscillating masses on a single chip is reported. These oscillations are caused by the Lorentz forces resulting from an alternating current through the masses interacting with a static magnetic field. Light is modulated by relative in-plane movement of the masses and a fixed frame and subsequently detected by two photodiodes. Evaluation of magnitude and phase of the output signal reveals information about the uniformity of the magnetic field. The sensor is capable of detecting uniaxially strength and direction of magnetic gradient fields, offset gradient fields and homogeneous fields.

This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product development cycles. In addition, 3D-printing enables ‘true’ three-dimensional MEMS structures in contrast to the traditional MEMS technology which allows only two dimensional structures. The measurement approach comprises a hybrid implementation of an optical modulator, an LED and a photodetector.

This paper reports on a novel, miniaturized magnetomechanical transducer/sensor made of borosilicate glass with wide dynamic range. The prototype is manufactured with laser micromachining and ablation techniques. Compared to state of the art, borosilicate glass substrate offers the highest thermal shock resistance and is best suited for MEMS magnetometers, for aerospace and space applications or magnetic monitoring systems for diagnostics and plasma stability control of nuclear fusion experiments, where thermal shock resistance is a critical requirement.

This paper reports a novel 3D printed MEMS magnetometer with optical readout, which demonstrates the advantages of 3D printing technology in terms of rapid prototyping. Low-cost and fast product development cycles favour 3D printing as an effective tool. Sensitivity measurement with such devices indicate high accuracy and good structural performance, considering material and technological uncertainties. This paper is focusing on the novelty of the rapid, 3D-printing prototyping approach and verification of the working principle for printed MEMS magnetometers.

We report on a new optical sensing principle for measuring the electric field strength based on MEMS technology. This method allows for distortion-free and point-like measurements with high stability regarding temperature. The main focus of this paper rests on an enhanced measurement set-up and the thereby obtained measurement results. These results reveal an improved resolution limit and point to the limitations of the current characterization approach. A resolution limit of 222 V/m was achieved while a further improvement of roughly one order of magnitude is feasible.