1. Growth of diamond-like films by dc plasma chemical vapor deposition
- Author
-
Wang Chang-Sui, Zou Zu-Ping, Liu Jiezhou, Zhan Rujuan, Zhou Guien, Wu Zhi-Qiang, Gao Ke-Lin, Ye Jian, Wang Yanxia, Liu Hong-Tu, and Xiang Zhilin
- Subjects
Materials science ,Hybrid physical-chemical vapor deposition ,technology, industry, and agriculture ,Analytical chemistry ,General Physics and Astronomy ,Diamond ,Plasma ,Chemical vapor deposition ,Combustion chemical vapor deposition ,engineering.material ,Molecular physics ,symbols.namesake ,symbols ,engineering ,Deposition (phase transition) ,Fourier transform infrared spectroscopy ,Raman spectroscopy - Abstract
Diamond-like films have been deposited by dc plasma chemical vapor deposition (CVD). During deposition, the characteristics of the plasma have been measured by means of the Langmuir single probe. The structure of the deposits has been studied by x-ray diffraction, Raman spectroscopy and Fourier transform infrared spectroscopy.
- Published
- 1990