1. Towards synchrotron-based nanocharacterization.
- Author
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Bleuet, Pierre, Arnaud, Lucile, Biquard, Xavier, Cloetens, Peter, Doyen, Lise, Gergaud, Patrice, Lamontagne, Patrick, Lavayssière, Maylis, Micha, Jean-Sébastien, Renault, Olivier, Rieutord, François, Susini, Jean, and Ulrich, Olivier
- Subjects
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SYNCHROTRONS , *PARTICLE accelerators , *NANOTECHNOLOGY , *TOMOGRAPHY , *MICROSCOPY - Abstract
The advent of 3rd generation synchrotron sources coupled with high efficiency x-ray focusing optics opened new nanocharacterization possibilities. This paper is an overview of synchrotron-based techniques that may be of interest for nanotechnology researchers. Although not exhaustive, it includes a general background of synchrotron principle and main x-ray interactions before addressing nanoimaging possibilities. Three-dimensional (3D) hard x-ray multimodal tomography is now doable that allows producing 3D morphological, chemical and crystalline images with a sub-100 nm resolution. Although the resolution is still limited with respect to electron imaging, it presents attractive features like depth resolution and non-destructive exam. Besides imaging, diffraction also allows strain determination within microstructures and is illustrated here on 100 nm copper lines. Surface analysis is illustrated through X-ray Photoelectron Emission Microscopy (XPEEM). [ABSTRACT FROM AUTHOR]
- Published
- 2009
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