1. Influence of La0.5Sr0.5CoO3 Heterostructure Electrodes on Pb(Zr,Ti)O3 Thin Film Properties
- Author
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Woong Kil Choo, Park Soon, Sang-In Lee, Bong Jin Kuh, and Ki Vin Im
- Subjects
Materials science ,General Engineering ,General Physics and Astronomy ,Heterojunction ,Sputter deposition ,Ferroelectricity ,law.invention ,Capacitor ,Hysteresis ,law ,visual_art ,visual_art.visual_art_medium ,Ceramic ,Thin film ,Composite material ,Perovskite (structure) - Abstract
The effect of multiple-layer bottom electrodes including a La0.5Sr0.5CoO3 (LSCO) layer on the ferroelectric and electric fatigue properties of the PbZr0.5Ti0.5O3 (PZT 50/50) thin film capacitor was investigated. Conductive LSCO thin films consisting of fine perovskite grains can be obtained at relatively low temperatures (400°C) by magnetron sputtering of the ceramic LSCO target. It is found that PZT capacitors having heterostructure electrodes such as Pt/PZT/LSCO/SiO2/Si and Pt/PZT/LSCO/Pt/Ti/SiO2/Si exhibit asymmetric hysteresis loops. These asymmetric capacitors also show fairly good fatigue endurance. Dependence of fatigue on the applied voltage will also be described.
- Published
- 2000
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