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Process monitoring at industrial sites contributes to system stability by detecting and diagnosing unexpected changes in a system. Today, as the infrastructure of industrial sites is advancing because of the development of communication technology, vast amounts of data are generated, and the importance of a way to effectively monitor such data in order to diagnose a system is increasing daily. Because a method based on a deep neural network can effectively extract information from a large amount of data, methods have been proposed to monitor processes using such networks to detect system faults and abnormalities. Neural-network-based process monitoring is effective in detecting faults, but has difficulty in diagnosing because of the limitations of the black-box model. Therefore, in this paper we propose a process-monitoring framework that can detect and diagnose faults. The proposed method uses a class activation map that results from diagnosis of faults and abnormalities, and verifies the diagnosis by post-processing the class activation map. This improves the detection of faults and abnormalities and generates a class activation map that provides a more verified diagnosis to the end user. In order to evaluate the performance of the proposed method, we did a simulation using publicly available industrial motor datasets. In addition, after establishing a system that can apply the proposed method to actual manufacturing companies that produce sapphire nozzles, we carried out a case study on whether fault detection and diagnosis were possible. [ABSTRACT FROM AUTHOR]