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Thickness-modulated optical dielectric constants and band alignments of HfOxNy films grown by sputtering have been investigated by spectroscopic ellipsometry (SE) and x-ray photoelectron spectroscopy. Based on SE measurements, it has been noted that an increase in optical dielectric constant and band gap has been observed as a function of the film thickness. Analyses of thickness-dependent band alignment of the HfOxNy/Si system indicate that the valence band offset increases, but only slight change in the conduction band offset, resulting from the thickness-induced change in the structure. The suitable optical dielectric constants and band offsets relative to Si make sputtering-derived HfOxNy film a promising candidate for high-k gate dielectrics. [ABSTRACT FROM AUTHOR]

Composition-dependent electronic structure and optical properties of Hf1-xSixOy (0.1≤x≤0.6) gate dielectrics on Si at 450 °C grown by UV-photo-induced chemical vapor deposition (UV-CVD) have been investigated via x-ray photoemission spectroscopy and spectroscopy ellipsometry (SE). By means of the chemical shifts in the Hf 4f, Si 2p, and O 1s spectra, the Hf–O–Si bondings in the as-deposited films have been confirmed. Analyses of composition-dependent band alignment of Hf1-xSixOy/Si gate stacks have shown that the valence band (VB) offset (ΔEv) demonstrates little change; however, the values of conduction band offset (ΔEc) increase with the increase in the silicon atomic composition, resulting from the increase in the separation between oxygen 2p orbital VB state and antibonding d states intermixed of Hf and Si. Analysis by SE, based on the Tauc–Lorentz model, has indicated that decreases in the optical dielectric constant and increase in band gap have been observed as a function of silicon contents. Changes in the complex dielectric functions and band gap Eg related to the silicon concentration in the films are discussed systematically. From the band offset and band gap viewpoint, these results suggest that Hf1-xSixOy films provide sufficient tunneling barriers for electrons and holes, making them promising candidates as alternative gate dielectrics. [ABSTRACT FROM AUTHOR]

High-k gate dielectric YOxNy films were prepared by reactive sputtering. The effects of postdeposition annealing on the structure and optical properties of YOxNy films have been investigated. The x-ray diffraction result shows that the crystallization starts at the annealing temperature of 500 °C. Spectroscopic ellipsometry was employed to determine the optical properties of a set of YOxNy films annealed at various temperatures. It was found that the refractive index (n) of YOxNy films decreased with the increase of annealing temperature below 600 °C, whereas it increased with increasing annealing temperature above 600 °C. The annealing-temperature dependence of the optical band gap of YOxNy films was also discussed in detail. It has indicated that the optical band gap of YOxNy films shifts to higher energy after higher temperature annealing, which is likely due to the reduction of N content and the change of crystalline structure in YOxNy films. [ABSTRACT FROM AUTHOR]

The structural stability and optical properties of ultrathin HfAlOx films grown by facing-target reactive sputtering, depending on the postannealing temperature, have been determined via x-ray photoelectron spectroscopy and spectroscopic ellipsometry (SE). By virtue of the chemical shifts of Hf4f, Al2p, and Si2p core-level spectra, it has been found that the structural stability of HfAlOx/Si system sustains up to 800 °C. However, the breaking of the Hf–Al–O bond and the phase separation take place drastically at the annealing temperature of 900 °C. In particular, the information of an interfacial Si–O–Si bond as the dominant reaction during the postannealing treatment has been observed, confirmed by Fourier transform infrared spectroscopy. Analysis by SE, based on the Tauc-Lorentz model, has indicated that increase in the refractive index and reduction in thickness has been observed as a function of annealing temperature, originating from the annealing-induced higher packing density. The change of the complex dielectric functions and bandgap Eg correlated with the annealing temperature are discussed in detail. [ABSTRACT FROM AUTHOR]

We report in this letter that Hafnium oxynitride (HfOxNy) gate dielectrics were prepared by radio frequency (RF) reactive magnetron sputtering and optical properties of the HfOxNy thin films were investigated by spectroscopic ellipsometry with photon energy of 0.75–6.5 eV at room temperature. The investigations showed that the annealing temperatures have a strong effect on the optical properties of HfOxNy thin films. With increased annealing temperature, the refractive index n is observed to increase, while the extinction coefficient k decreases, respectively. The changes of the complex dielectric functions and the optical band gap Eg with the annealing temperature are also discussed. [ABSTRACT FROM AUTHOR]

The optical properties of δ-Bi2O3 thin films were investigated using spectroscopic ellipsometry and optical absorption spectrum. δ-Bi2O3 thin films were grown on Si and quartz substrates under different oxygen flow ratios (OFR) by radio frequency reactive magnetron sputtering. The Tauc-Lorentz dispersion method was adopted to model the optical dispersion functions of the thin films. The optical bandgap was obtained by three different methods. It was found that refractive index and extinction coefficient decrease, and the optical bandgap has a slight blue shift with increasing the OFR. Factors influencing the optical constants and optical bandgap are discussed. [ABSTRACT FROM AUTHOR]

Spectroscopic ellipsometry with photon energy 0.75–6.5 eV at room temperature has been used to derive the optical properties of nitrogen-incorporated HfO2 films on Si(100) substrates grown by radio-frequency reactive sputtering using different N2/(N2+O2+Ar) gas ratios from 20% to 50%. Excellent agreement has been found between the experimental and the simulated spectra, in which an empirical dielectric dispersion relation based on Tauc-Lorentz model has been successfully adopted. Increases in the refractive index n and the extinction coefficient. k, with increases in nitrogen-incorporation content are observed due to the nitrogen-incorporation-induced higher packing density. The change of the complex dielectric functions and reduction in the optical band gap with an increase in nitrogen concentration resulting from the effect of the nitrogen-incorporation on the structure are discussed in detail. [ABSTRACT FROM AUTHOR]