1. Breakdown properties of irradiated MOS capacitors
- Author
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Paccagnella, A., Candelori, A., Milani, A., Formigoni, E., Ghidini, G., Pellizzer, F., Drera, D., Fuochi, P.G., and Lavale, M.
- Subjects
Irradiation -- Research ,Metal oxide semiconductors -- Research ,Capacitors -- Research ,Breakdown (Electricity) -- Research ,Business ,Electronics ,Electronics and electrical industries - Abstract
We have studied the effects of ionizing and non-ionizing radiation on the breakdown properties of different types of MOS capacitors, with thick (200 nm) and thin (down to 8 nm) oxides. In general, no large variations of the average breakdown field, time-to-breakdown at constant voltage, or charge-to-breakdown values have been observed after high dose irradiation (20 Mrad(Si) 9 MeV electrons on thin and thick oxides, 17(Si) Mrad [Co.sup.60] gamma and [10.sup.14] neutrons/[cm.sup.2] only on thick oxides). However, some modifications of the cumulative failure distributions have been observed in few of the oxides tested.
- Published
- 1996