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Abstract: Scandium and cerium stabilized zirconium (10Sc1CeSZ) thin ceramic films were formed evaporating (ZrO2)0.89(CeO2)0.01(Sc2O3)0.10 micro powder using e-beam evaporation technique. The influence of deposition rate on formed thin films electrical properties and microstructure was studied. 10Sc1CeSZ thin films were deposited on two types of different substrates: optical quartz (SiO2) and Alloy 600 (Fe–Ni–Cr). Deposition rate was changed from 2 to 16Å/s to understand its influence on thin film formation and other properties. The formed 10Sc1CeSZ thin films keep the cubic crystal structure as the initial evaporated powder material but change the main crystallographic peak from (111) to (200) for both types of substrate and used deposition rates. It was determined that the crystallites size increases from 19.0 to 24.9nm and from 15.6 to 19.9nm on optical quartz and Alloy 600 respectively by increasing the deposition rate (in range from 2 to 16Å/s). The thin film density decreases by increasing the deposition rate. The ionic conductivity of 10Sc1CeSZ thin films was determined by impedance spectroscopy in the frequency range from 0.1Hz to 1.0MHz in temperature range from 473K to 873K. The best ionic conductivity σtot =4.91·10−2 Sm−1 at 873K temperature and the lowest value of activation energy ΔEa =0.88eV were found for 10Sc1CeSZ thin films formed at 4Å/s deposition rate. [Copyright &y& Elsevier]

Abstract: Yttrium stabilized zirconium (YSZ – (Y2O3)0,08(ZrO2)0,92) thin films were formed by e-beam evaporation technique. The powders of different surface areas were used to prepare thin ceramic films. The influence of the initial powder material on formed thin films electrical and microstructure properties was studied. YSZ thin films were deposited on two types of substrates: optical quartz (SiO2) and Alloy 600 (Fe–Ni–Cr) substrates. Deposition rate was changed from 2 to 16Å/s to test its influence on thin film formation and properties. Electrical parameters of YSZ thin ceramics were investigated in the frequency range from 0.1 to 1.0MHz in temperature range from 473 to 873K. The conductivity of the electrolyte YSZ-8 thin films was determined by impedance spectroscopy. The formed YSZ films repeat the crystallographic orientation of the initial powder material and do not depend on the powder grain size. It was determined that the deposition rate has influence on the crystallite size. Initial powder grain size and deposition rate influence the relative density of formed YSZ thin films. The ionic conductivity of formed films depends on the grain size of initial powder, also. [Copyright &y& Elsevier]

Abstract: Scandium stabilized zirconium (10ScSZ) thin ceramic films were deposited by e-beam evaporation of (ZrO2)0.90(Sc2O3)0.10 micro powder (particle size 0.5÷0.7μm). The influence of deposition rate on formed thin films microstructure and electrical properties was studied. 10ScSZ thin films were deposited on two types of different substrates: optical quartz (SiO2) and Alloy-600 (Fe–Ni–Cr) substrates. Deposition rate was changed from 2 to 16Å/s to test its influence on thin film formation and its properties. The microstructure of formed 10ScSZ thin ceramic films was studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Electrical parameters of formed thin ceramics were investigated in the frequency range from 0.1Hz to 1.0MHz (in temperature range from 473 to 873K). The ionic conductivity of the deposited electrolyte 10ScSZ thin films was determined by impedance spectroscopy. It was determined that the deposition rate (in range from 2 to 16Å/s) has influence on crystallite size. It increases by increasing the deposition rate from 18.4 to 26.9nm. The XRD measurements show that the formed 10ScSZ thin films do not repeat the crystallographic phase of the initial evaporated powder material—it is changes from rhombohedra (initial powder) to cubic (the formed thin films). [Copyright &y& Elsevier]