1. Fabrication of Structurally Simple Index-Matched ITO Films Using Roll-to-Roll Sputtering for Touch Screen Panel Devices.
- Author
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Kim, Cheol Hwan, Choi, Woo Jin, Cho, Seong Keun, Goshima, Daiji, Ham, Dong Seok, Kim, Kwang‐Je, Jeong, Jongkoo, Lee, Jae Heung, and Lee, Sang‐Jin
- Subjects
OPTICAL properties of indium tin oxide ,POLYETHYLENE ,TOUCH screen interfaces ,POLYMER blends ,ELECTRODE potential ,MATHEMATICAL models - Abstract
We report the electrical and optical properties of structurally simple refractive-index-matched indium tin oxide (IM-ITO) films prepared on high-refractive index hard-coated polyethylene terephthalate (KM-V2) substrates by using a pilot scale roll to roll magnetron sputtering system for implementation in touch screen panels. We found that the ITO thin films are polycrystalline with a preferred (222) orientation. We determined the appropriate conditions for the deposition of simplestructure IM-ITO films on KM-V2 substrates for touch screen panels with an invisible electrode pattern. Moreover, the outgassing of the polymer substrate is very important in the roll-to-roll sputtering fabrication of high-quality IM-ITO films with the required electrical and optical properties. [ABSTRACT FROM AUTHOR]
- Published
- 2015
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