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Automatic alignment of a synchrotron beamline by Hartmann technique was performed, in the soft X-ray range (E = 3 keV, λ = 0.414 nm), using a 4-actuators Kirkpatrick-Baez (KB) active optic. A system imaging the KB focal spot and a soft X-ray Hartmann wave-front sensor were used alternatively to control the KB. The beam corrected with the help of the imaging system was used to calibrate the wave-front sensor. With both closed loops, we focused the beam into a 6.8×9 μm2 FWHM focal spot. Closed-loop corrections are limited by the optical quality of the imaging system. © 2007 American Institute of Physics [ABSTRACT FROM AUTHOR]

We report an experimental demonstration of wavefront analysis via the Hartmann technique in the EUV. The reference wave front needed to calibrate the sensor was generated by spatially filtering a focused undulator beam with 1.7 (0.6) μm pinhole. To fully characterize the sensor, accuracy and sensitivity measurements were performed. The incident beam’s wavelength was varied between 7 and 25 nm. Measurements of accuracy better than λEUV=120 (0.11 nm) were obtained λEUV=13.4 nm. The wavefront of the spatially unfiltered incident beam was also measured. © 2004 American Institute of Physics [ABSTRACT FROM AUTHOR]