1. InAs nanowire growth modes on Si (111) by gas source molecular beam epitaxy.
- Author
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Robson, M.T. and LaPierre, R.R.
- Subjects
- *
INDIUM arsenide , *SILICON nanowires , *MOLECULAR beam epitaxy , *CRYSTAL growth , *NANOSTRUCTURES , *CRYSTAL morphology - Abstract
InAs nanowires (NWs) were grown on silicon substrates by gas source molecular beam epitaxy using five different growth modes: (1) Au-assisted growth, (2) positioned (patterned) Au-assisted growth, (3) Au-free growth, (4) positioned Au-assisted growth using a patterned oxide mask, and (5) Au-free selective-area epitaxy (SAE) using a patterned oxide mask. Optimal growth conditions (temperature, V/III flux ratio) were identified for each growth mode for control of NW morphology and vertical NW yield. The highest yield (72%) was achieved with the SAE method at a growth temperature of 440 °C and a V/III flux ratio of 4. Growth mechanisms are discussed for each of the growth modes. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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