1. How to obtain metal-polar untwinned high-quality (1 0 −1 3) GaN on m-plane sapphire.
- Author
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Hu, Nan, Dinh, Duc V., Pristovsek, Markus, Honda, Yoshio, and Amano, Hiroshi
- Subjects
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GALLIUM nitride , *SPUTTERING (Physics) , *ALUMINUM nitride , *METAL organic chemical vapor deposition , *CRYSTAL growth - Abstract
Highlights • Ga-polar untwinned (1 0 −1 3) GaN was obtained by directional sputtering. • FWHM values are less than 550 aresec. • Al nucleation layer in directional sputtering affects the GaN layer much. Abstract Directional sputtering of Al and AlN on (1 0 −1 0) sapphire was used to obtain metal-polar (1 0 −1 3) templates. After overgrowth with AlN and GaN using metal-organic vapor phase epitaxy, we obtained untwinned (1 0 −1 3) GaN layers. Full width at half maximum of the X-ray rocking curve of symmetric (1 0 −1 3) GaN is less than 550 arcsec along both [3 0 −3 −2] GaN and [1 −2 1 0] GaN directions. Ga-polarity of the layers was confirmed by high-resolution scanning transmission electron microscopy. Careful optimization of time and temperature of the initial Al sputtered layer was a key parameter to achieve high quality GaN templates. [ABSTRACT FROM AUTHOR]
- Published
- 2019
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