Search

Your search keyword '"Fuse, G."' showing total 1 results
Start Over Author "Fuse, G." Topic crystal defects
1 results on '"Fuse, G."'

1. Arsenic implantation to oxide filled trench isolation structure.

Author

Fuse, G., Iwasaki, H., and Onoda, M.

Subjects
*CRYSTAL defects, *OXIDATION, *ION implantation
Abstract

Examines the crystal defects of devices with oxide filled trench isolation introduced by arsenic implantation. Dependence of growth on oxidation conditions; Cross-sectional views of the devices; Solid phase epitaxial regrowth on the edge of the silicon island; Influence of stress on the oxidation of silicon substrates.

Published
1991
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results