151. CNN-based method for chromatic confocal microscopy.
- Author
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Wu, Juanjuan, Yuan, Ye, Liu, Tao, Hu, Jiaqi, Xiao, Delong, Wei, Xiang, Guo, Hanming, and Yang, Shuming
- Subjects
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CONVOLUTIONAL neural networks , *DEEP learning , *CONFOCAL microscopy , *ARTIFICIAL intelligence , *ELECTRONIC data processing , *CURVE fitting - Abstract
In view of the inevitable error problems caused by peak extraction, calibration curve fitting and other essential operations in the traditional data processing of chromatic confocal microscopy (CCM), a regression model based on convolutional neural network (CNN) is proposed so that the above necessary operations are no longer required. This CNN-based regression model draws on the core concepts of the AlexNet model and has been moderately customized and optimized to make it more suitable for CCM application scenarios. The proposed method has been v alidated using a completely homemade CCM apparatus The experimental results showed that the CNN-based method is feasible for the CCM measurement and exhibits better stability and higher axial resolution than traditional methods, indicating that deep learning has good application value in the data processing of CCM. • A new chromatic confocal sensing method based on artificial intelligence is proposed. A model based on the deep convolutional neural network (CNN) has been established. • With the new method, traditional data processing methods, i.e., the peak extraction algorithm and the calibration procedure, required in chromatic confocal microscopy are no longer needed. • An experimental prototype has been built, and detailed experimental tests for resolution, accuracy, and 3D topography were carried out. • The measurement results proved that the CNN-based model can improve the axial resolution and measurement precision. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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