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Your search keyword '"Rainer Engelke"' showing total 5 results

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5 results on '"Rainer Engelke"'

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1. Thickness measurement in ultrathick multilayer microstructures

2. Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears

3. Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique

4. SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts

5. Investigations on possibilities of inline inspection of high aspect ratio microstructures

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