51. Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
- Author
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So-Young Han, Jin-Goo Park, Nagendra Prasad Yerriboina, Bichitra Nanda Sahoo, Bong-Kyun Kang, and Andreas Klipp
- Subjects
Materials science ,Pulmonary surfactant ,Chemical engineering ,Bubble ,Dynamics (mechanics) ,Megasonic cleaning ,General Materials Science ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics - Abstract
Megasonic cleaning is one of the promising technologies to remove the particles during semiconductor processing. Acoustic bubble cavitation plays a key role in removing the particles. In this work, the effect of an anionic surfactant sodium dodecyl sulfate (SDS) on a bubble in the presence of hydrogen dissolved DIW water was studied. The bubble dynamics were observed using a high-speed camera. It was found that with the increase of surfactant the bubble characteristics were changed very significantly. Several parameters affecting the bubble dynamics were investigated.
- Published
- 2021