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1. Carboxylic Acids as Oxygen Supplying Agents for Atomic Layer Deposition of Oxide Thin Films

2. Carboxylic acids as oxygen supplying agents for ALD of high k thin films

3. ALD of High-k thin films using carboxylic acids as oxygen supplying agents

4. Carboxylic acids as oxygen sources for the atomic layer deposition of high-k metal oxides

5. Non-aqueous Sol-Gel routes applied to atomic layer deposition

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