1. Finite element analysis on factors influencing the clamping force in an electrostatic chuck
- Author
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Sun Yuchun, Cheng Jia, Yang Yiyong, Ji Linhong, Wang Xingkuo, Cao Minglu, and Wang Kesheng
- Subjects
Engineering ,business.industry ,Mechanical engineering ,Radius ,Condensed Matter Physics ,computer.software_genre ,Clamping ,Finite element method ,Electronic, Optical and Magnetic Materials ,Simulation software ,Semiconductor ,Etching ,Electrode ,Materials Chemistry ,Electrical and Electronic Engineering ,business ,computer ,Voltage - Abstract
As one of the core components of IC manufacturing equipment, the electrostatic chuck (ESC) has been widely applied in semiconductor processing such as etching, PVD and CVD. The clamping force of the ESC is one of the most important technical indicators. A multi-physics simulation software COMSOL is used to analyze the factors influencing the clamping force. The curves between the clamping force and the main parameters such as DC voltage, electrode thickness, electrode radius, dielectric thickness and helium gap are obtained. Moreover, the effects of these factors on the clamping force are investigated by means of orthogonal experiments. The results show that the factors can be ranked in order of voltage, electrode radius, helium gap and dielectric thickness according to their importance, which may offer certain reference for the design of ESCs.
- Published
- 2014