1. Fault Detection Prediction Using a Deep Belief Network-Based Multi-Classifier in the Semiconductor Manufacturing Process
- Author
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Young Shin Han, Jong Sik Lee, and Jae-Kwon Kim
- Subjects
0209 industrial biotechnology ,Computer Networks and Communications ,Semiconductor device fabrication ,Computer science ,020209 energy ,02 engineering and technology ,computer.software_genre ,Computer Graphics and Computer-Aided Design ,Fault detection and isolation ,Semiconductor industry ,Deep belief network ,020901 industrial engineering & automation ,Artificial Intelligence ,Order (business) ,0202 electrical engineering, electronic engineering, information engineering ,Wafer ,Data mining ,Classifier (UML) ,computer ,Software - Abstract
The semiconductor manufacturing process is very complex, and it is the most important part of the semiconductor industry. In order to test whether or not wafers are functioning normally, a pass/fail test is conducted; however, time and cost needed for this testing increase as the number of chips increases. To address this, a machine learning technique is adopted and a high-performance classifier is needed to determine whether a pass/fail test is accurate or not. In this paper, a deep belief network (DBN)-based multi-classifier is proposed for fault detection prediction in the semiconductor manufacturing process. The proposed method consists of two phases: The first phase is a data pre-processing phase in which features required for semiconductor data sets are extracted and the imbalance problem is solved. The second phase is to configure the multi-DBN using selected features. A DBN classifier is created for each feature and, finally, fault detection prediction is performed. The proposed method showed excellent performance and can be used in the semiconductor manufacturing process efficiently.
- Published
- 2019
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