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Abstract In the present study, molybdenum doped chromium nitride coatings deposited onto silicon substrates via unbalanced magnetron sputtering, in as-deposited and annealed conditions, at 500–800 °C in steps of 100 °C, were studied to reveal their temperature dependent structural, morphological, optical and mechanical behaviors. An analysis of these features was carried out using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), ultraviolet visible (UV–Vis) spectroscopy, nanoindentation and finite element modeling (FEM) techniques. XRD results exhibited a significant improvement in the crystallinity of the Molybdenum (Mo)-doped chromium nitride (CrN) coatings along (111) and (200) diffraction planes, as the annealing temperatures increased. The lattice parameters gradually decreased from 4.20 to 4.12 Å as the temperature increased. The same tendency was also observed for lattice microstrains and residual stresses. Smooth grain-like surfaces were observed by FESEM imaging techniques. At an annealing temperature of 700 °C, the spectral absorptance of Mo:CrN films attained its peak value (86%), whereas the energy band-gaps were reduced from 2.48 to 1.14 eV. The other optical parameters such as complex dielectric constants, Urbach energy values, and steepness parameters of these coatings were also discussed. The hardness and elastic modulus of the as-deposited Mo:CrN films were estimated to be 18.4 and 287 GPa, respectively. At a film thickness of 1.0 μm, the highest stress of 20 GPa was evaluated, via FEM studies, at the interface between the film and the substrate. As the film thickness was enhanced, the stress level decreased. At higher annealing temperatures, both the mechanical hardness (H) and the elastic modulus (E) of Mo-doped CrN coatings dwindled. Highlights • Mo:CrN sputtered films were studied for the opto-dielectric, and mechanical properties. • A high solar absorptance of 86% was attained by Mo:CrN coating annealed at 700 °C. • Mechanical studies show that hardness & elastic modulus increases with annealing. • Substrates with higher elastic modulus induces higher level of coating's stress. [ABSTRACT FROM AUTHOR]

Chromium nitride (CrN) coatings were deposited by magnetron sputtering onto Si(100) substrates. The coatings were then annealed at different temperatures (500–800 °C in steps of 100 °C) in air for 1 h. X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), X-ray photoelectron spectroscopy (XPS), UV–Vis spectroscopy, nanoindentation tests and finite element modeling (FEM) were conducted in order to investigate their structural, morphological, optical and mechanical properties. XRD patterns show that the crystallinity of the CrN phase increases with the rise in annealing temperatures together with its preferred orientations along (111) and (200) diffraction planes. The lattice constants were slightly reduced from 4.19 to 4.11 nm at 800 °C. The lattice micorstrains and residual stresses were also reduced as the annealing temperatures rose as a result of reduced defects, dislocations and vacancies. Smooth grain-like surfaces with grain sizes ranging between ∼50 and 250 nm were confirmed by FESEM micrographs. XPS studies indicated the existence of Cr and N on the coating systems. Optical studies showed that with the rise in annealing temperature of up to 700 °C, the solar absorptance of CrN coatings is increased from 61% to 89% and slightly decreased at 800 °C, while the optical band-gap energy dropped from 2.62 to 1.38 eV and slightly increased to 1.48 eV at 800 °C. A gradual increase of dielectric constants of CrN films were realized with the subsequent annealing progression. Nanoindentation results indicated that as the annealing progresses, the hardness and elastic modulus values are lowered. [ABSTRACT FROM AUTHOR]

Chromium nitride (CrN)-based materials display broad applications as protective coatings for automotive, power generation and aerospace industries, in which surfaces are often subjected to wear and corrosion. By using an appropriate choice of dopant, one can further increase the mechanical hardness, corrosion and oxidation resistance of these coatings. In order to identify the effect of dopants on the structural evolution and surface electronic properties of CrN coatings, Cr 1- z (Al/Si) z N coatings were prepared by magnetron sputtering and then characterized via X-ray diffraction (XRD) and soft X-ray synchrotron radiation Near-edge X-ray Absorption Fine Structure (NEXAFS) studies around N K -edge. Higher degree of crystallinity of the coatings were identified through XRD studies. The bonding structure, of the doped CrN coating, was analyzed by Near-edge X-ray Absorption Fine Structure (NEXAFS) measurements performed around the N K -edge (390–450 eV) in the Auger electron yield (AEY) and total fluorescence yield (TFY) modes. NEXAFS analysis revealed Cr 3d (Al3 p /Si3 p )N2 p hybridizations in Cr 1- z (Al/Si) z N compositions and complex structure splitting via spin–orbit interaction of the Cr3 d levels. [ABSTRACT FROM AUTHOR]