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This work describes a versatile and cost-effective cell culture method for micropatterning and growing adherent cells on porous membranes using pressure-sensitive double-sided adhesives. This technique also allows cell culture using conventional methods and their easy integration into microfluidic chip devices. Adhesives can be used to form different patterns of cultured cells, which can be used for cell proliferation and wound-healing models. To demonstrate the viability of our system, we evaluate the toxicity effect of five different adhesives on two distinct airway epithelial cell lines and show functional applications for cell patterning and microfluidic cell culture chip fabrication. We developed a sandwiched microfluidic device that enabled us to culture cells in a submerged condition and transformed it into a dynamic platform when required. The viability of cells and their inflammatory responses to IL-1β stimulation were investigated. Our technique is applicable for conventional culturing of cells, widely available in biomedical research labs, while enabling the introduction of perfusion for an advanced dynamic cell culture model when needed.

Copper interconnect electroplating is one of the core technologies for the manufacture of high-end electronic devices including but not limited to chips. To promote the development of advanced copper interconnect process, it is necessary to clarify the mechanisms of copper electroplating additives. Herein, we provide a brief overview of the research progress on the interfacial structures and mechanisms of the three types of additives (accelerator, suppressor and leveler) in copper sulfate plating baths from a methodological perspective. Besides, the advantages and limitations of different research methods are discussed and the scientific issues related to the Damascene copper electroplating are summarized, to afford a hint for the further research and development of the additives in advanced chip fabrication.

In situ transmission electron microscopy (TEM) is a high-spatial-resolution observation tool that can provide real-time electrochemical process monitoring, thus analyzing mechanisms, building material structure-property relationships, and enhancing electrochemical performances. Based on the development of liquid cell chip fabrication technology, this article reviews the application of in situ TEM in the electrochemical field in recent years, including electrochemical deposition, energy storage, electrocatalysis and electrochemical corrosion. In addition, we summarize the challenges of the in situ TEM and its potential applications in electrochemistry.

One of the most cited limitations of biochemical detection is its poor sensitivity, owing to the relatively high complexity of micro-samples. Moreover, some samples cannot be easily self-replicated and their abundance cannot be increased through traditional technologies. Therefore, the preconcentration of low-abundance samples is a key requirement for microfluidic biological analysis. In recent years, the ion-concentration polarization phenomenon has aroused widespread interest in the application of microfluidic technology. In addition, paper-based materials are readily available, easy to modify, and exhibit good hydrophilicity. The study of the ion-concentration polarization preconcentration of micro-samples in paper-based microfluidic chips is of considerable significance. In this review, we discuss the development and applications of ion-concentration polarization paper-based preconcentrator in the past 5 years, with emphasis on key progresses in chip fabrication and performance optimization under different conditions. The current needs and development prospects in this field have also been discussed.

Currently used animal and cellular models for pulmonary arterial hypertension (PAH) only partially recapitulate its pathophysiology in humans and are thus inadequate in reproducing the hallmarks of the disease, inconsistent in portraying the sex-disparity, and unyielding to combinatorial study designs. Here we sought to deploy the ingenuity of microengineering in developing and validating a tissue chip model for human PAH. We designed and fabricated a microfluidic device to emulate the luminal, intimal, medial, adventitial, and perivascular layers of a pulmonary artery. By growing three types of pulmonary arterial cells (PACs)-endothelial, smooth muscle, and adventitial cells, we recreated the PAH pathophysiology on the device. Diseased (PAH) PACs, when grown on the chips, moved of out their designated layers and created phenomena similar to the major pathologies of human PAH: intimal thickening, muscularization, and arterial remodeling and show an endothelial to mesenchymal transition. Flow-induced stress caused control cells, grown on the chips, to undergo morphological changes and elicit arterial remodeling. Our data also suggest that the newly developed chips can be used to elucidate the sex disparity in PAH and to study the therapeutic efficacy of existing and investigational anti-PAH drugs. We believe this miniaturized device can be deployed for testing various prevailing and new hypotheses regarding the pathobiology and drug therapy in human PAH.

2019 yılında ortaya çıkan çip krizi ile çip üretimine artan talep üssel oranda artmaya devam etmektedir. Yarı iletken sektörünün önde gelen üreticileri artan bu talep karşısında yeni altyapı yatırımları ile mevcut sistemlerinin verimini artırmak için adımlar atmaktadır. Bu adımlar arasında araştırma enstitüleri ile ortak yapılan araştırmalar, bazı veri setlerinin araştırmacılara açık hale getirilmesi gibi çalışmalar yer almaktadır. Çip üretim süreci oldukça maliyetli ve hata toleransı çok düşük adımlara sahiptir. Bu sebeple üretimin en kritik adımı olan 'Litografi' adımında yapılan wafer kusur analizinin, üretilen her wafer için yapılması gerekmektedir. Bir waferda tespit edilen kusur desenini oluşturan hata kaynakları giderilmedikçe üretime devam edilmemektedir. Bu da wafer kusur desenlerinin oldukça hızlı ve doğru şekilde sınıflandırılıp, sorun giderici önlemlerin en kısa sürede alınmasını gerektirir. Bu çalışmada çip sektörünün en yüksek hacimli üreticisi TSMC firmasının, MIRLAB iş birliğiyle araştırmacılara açık hale getirdiği WM-811K isimli gerçek çip üretim şartlarından elde edilmiş wafer veri seti kullanılarak, wafer kusur desenini sınıflandıran bir evrişimli sinir ağı modeli geliştirilmiştir. Çip üretiminin maliyetli ve yüksek teknolojik altyapı gerektirdiği göz önünde bulundurulduğunda, araştırmacılara açık hale getirilen bu veri setinin değeri daha iyi anlaşılabilir. Bu sayede yapılan araştırmalar tekrarlanabilir, karşılaştırılabilir ve daha şeffaf hale gelmiştir. Tabi bu durumdan en çok yine çip üreticileri yararlanacaktır. Elde edilen evrişimli sinir ağı modeli, genel olarak 94% doğruluk göstermiş ve bir uzman mühendisin 5 sn'de yaptığı sınıflandırma işlemini 0.0015sn'de yaparak bir günde yaklaşık 8 saatlik bir iş gücünü tasarruf ettirebilecektir. Önerilen yöntem, literatürde WM-811K veri setini kullanarak geliştirilen diğer makine öğrenmesi algoritmaları ile karşılaştırılmış ve sınıflandırdığı 8 farklı wafer deseni kategorisinden 3'ünde literatüre kıyasla daha yüksek doğruluk göstermiştir. Diğer 5 wafer deseni kategorisinde de literatüre kıyasla ortalamanın üzerinde bir performans göstermiştir. With the chip crisis that emerged in 2019, the increasing demand for chip production continues to increase at an exponential rate. The leading manufacturers of the semiconductor industry are taking steps to increase the efficiency of their existing systems with new infrastructure investments in the face of this increasing demand. Among these steps are studies carried out jointly with research institutes, making some datasets available to researchers. The chip manufacturing process is very costly and has very low fault tolerance steps. For this reason, the wafer defect analysis made in the 'Lithography' step, which is the most critical step of production, must be done for each wafer produced. Production is not continued unless a defect pattern detected in a wafer is corrected. This requires very fast and accurate classification of wafer defect patterns and prompt remedial action. In this study, a convolutional neural network model was developed to classify the wafer defect pattern by using the wafer dataset obtained from real chip production conditions named WM-811K, which was made available to researchers by TSMC, the highest volume manufacturer of the chip industry, in cooperation with MIRLAB. Considering that chip production is costly and requires high technological infrastructure, the value of this data set, which has been made available to researchers, can be better understood. In this way, research has become reproducible, comparable and more transparent. Of course, chip manufacturers will benefit the most from this situation. The resulting convolutional neural network model showed 94% accuracy in general, and it can save about 8 hours of work in a day by performing the classification process in 0.0015 seconds, which an expert engineer does in 5 seconds. The proposed method was compared with other machine learning algorithms developed using the WM-811K dataset in the literature and showed higher accuracy in 3 of 8 different wafer pattern categories it classified compared to the literature. It also performed above the average in the other 5 wafer pattern categories compared to the literature

Tissue nanotransfection (TNT) is an electromotive gene transfer technology that was developed to achieve tissue reprogramming in vivo. This protocol describes how to fabricate the required hardware, commonly referred to as a TNT chip, and use it for in vivo TNT. Silicon hollow-needle arrays for TNT applications are fabricated in a standardized and reproducible way. In

Ovarian cancer has the highest mortality rate in the world. Therefore, it is urgent but still challenging to develop an efficient circulating tumor cell (CTC) detection method to sensitively detect ovarian cancer. To address such issues, herein, for the first time, we present a novel CTC detection method for ovarian cancer cells by designing sensitive and rapid graphene-based biosensors. This graphene-based sensor, consisting of a cell pool and two electrodes, can be prepared by a conventional chip fabrication process. It demonstrates high-sensitivity detection even for several ovarian cancer cells by comparing the electrical signal before and after adding cell solution. Moreover, the graphene-based biosensors can perform rapid detection with good repeatability. This suggests that this novel method is possible to use for the early detection of ovarian cancer with very low CTC cell concentration. This work provides a novel and quick strategy to detect ovarian cancer and further judge or predict the risk of the transfer of ovarian cancer.

As general-purpose processors have hit the power wall and chip fabrication cost escalates alarmingly, coarse-grained reconfigurable architectures (CGRAs) are attracting increasing interest from both academia and industry, because they offer the performance and energy efficiency of hardware with the flexibility of software. However, CGRAs are not yet mature in terms of programmability, productivity, and adaptability. This article reviews the architecture and design of CGRAs thoroughly for the purpose of exploiting their full potential. First, a novel multidimensional taxonomy is proposed. Second, major challenges and the corresponding state-of-the-art techniques are surveyed and analyzed. Finally, the future development is discussed.

Design automation of Digital Microfluidic biochip (DMFB) is one of the active research topics in recent years. A couple of studies have been conducted to minimize the reservoir switching count, which significantly speeds up a multi-reactant mixing process. In general, it is easier to reduce the switching count if more on-chip storage units are available. Nevertheless, in reality, the number of storages is often limited due to the chip fabrication cost. Therefore, in this paper, we present a storage-aware scheduling algorithm for reservoir switching minimization. Experimental results demonstrate that the proposed algorithm can reduce the storage requirement by 44% while still achieving a 38% decrease in the reservoir switching count when compared with a state-of-the-art method.

International audience; The choice of materials used in the chip fabrication is crucial in microfluidics. They are selected and adapted depending on the available production techniques and associated processes, the involved characterization and measurement methods, the physical and chemical experimental conditions, and the cost. Here, we propose a versatile approach using a combination of epoxy materials to fabricate manually resealable and reusable (>40 times) microfluidic chips which demonstrate numerous potentialities: good chemical resistance, optical (visible and X-ray) transparency, biocompatibility, capability to undergo in average 2.9 bar of liquid pressure, or integration of high aspect ratio (>1500) channels. It thus represents a promising alternative for prototyping in a large panel of applications and fundamental studies.

Medical implantable devices can use photovoltaic (PV) energy harvesting to extend battery life span and increase their performance. The power conditioning and management circuitry is essential not only to regulate the voltage requirements of the load but also optimize the output power of PV cells. However, the optical losses due to the skin and the device characteristics of the PV cells are rarely analyzed before chip fabrication. This inevitably leads to sub-optimal system performance in in-vitro or in-vivo tests owing to the varying PV output characteristics. To address this problem, we use the finite-element-method (FEM) to analyze the optical and physical performance of the PV cell under the skin, and then export the model into the p-spice simulator for circuit-level implementation. We further demonstrate a 1:2 cross-coupled DC-DC converter using pulse density modulation for load regulation control to meet the loading requirement. In this work, the PV cell can achieve an 18% of efficiency, and the power conditioning circuit can provide an 84% of end-to-end efficiency.

Microfluidic wet spinning has gained increasing interest in recent years as an alternative to conventional wet spinning by offering higher control in fiber morphology and a gateway for the development of multi-material fibers. Conventionally, microfluidic chips used to create such fibers are fabricated by soft lithography, a method that requires both time and investment in necessary cleanroom facilities. Recently, additive manufacturing techniques were investigated for rapid and cost-efficient prototyping. However, these microfluidic devices are not yet matching the resolutions and tolerances offered by soft lithography. Herein, we report a facile and rapid method using selected arrays of hypodermic needles as templates within a silicone elastomer matrix. The produced microfluidic spinnerets display co-axially aligned circular channels. By simulation and flow experiments, we prove that these devices can maintain laminar flow conditions and achieve precise 3D hydrodynamic focusing. The devices were tested with a commercial polyurethane formulation to demonstrate that fibers with desired morphologies can be produced by varying the degree of hydrodynamic focusing. Thanks to the adaptability of this concept to different microfluidic spinneret designs&mdash, as well as to its transparency, ease of fabrication, and cost-efficient procedure&mdash, this device sets the ground for transferring microfluidic wet spinning towards industrial textile settings.

Lung cancer is the most common and deadliest cancer type globally. Its early diagnosis can guarantee a five-year survival rate. Unfortunately, application of the available diagnosis methods such as computed tomography, chest radiograph, magnetic resonance imaging (MRI), ultrasound, low-dose CT scan, bone scans, positron emission tomography (PET), and biopsy is hindered due to one or more problems, such as phenotypic properties of tumours that prevent early detection, invasiveness, expensiveness, and time consumption. Detection of lung cancer biomarkers using a biosensor is reported to solve the problems. Among biosensors, optical biosensors attract greater attention due to being ultra-sensitive, free from electromagnetic interference, capable of wide dynamic range detection, free from the requirement of a reference electrode, free from electrical hazards, highly stable, capable of multiplexing detection, and having the potential for more information content than electrical transducers. Inspired by promising features of plasmonic sensors, including surface plasmon resonance (SPR), localised surface plasmon resonance (LSPR), and surface enhanced Raman scattering (SERS) such as ultra-sensitivity, single particle/molecular level detection capability, multiplexing capability, photostability, real-time measurement, label-free measurement, room temperature operation, naked-eye readability, and the ease of miniaturisation without sophisticated sensor chip fabrication and instrumentation, numerous plasmonic sensors for the detection of lung cancer biomarkers have been investigated. In this review, the principle plasmonic sensor is explained. In addition, novel strategies and modifications adopted for the detection of lung cancer biomarkers such as miRNA, carcinoembryonic antigen (CEA), cytokeratins, and volatile organic compounds (VOCs) using plasmonic sensors are also reported. Furthermore, the challenges and prospects of the plasmonic biosensors for the detection of lung cancer biomarkers are highlighted.

The development of automatic analyzers based on flow techniques involves the use and continuous innovation of fluidic devices. New trends tend toward miniaturization of sophisticated fluidic platforms requiring continuous advances in this field. The availability of a mechanic and electronic workshop together with the know-how to build new fluidic devices provides the tools for the creation of innovative instrumentation and stimulates the creativity of analytical chemists. Thus, in this review we present how to build and use flow-based fluidic devices, together with the tools required, such as computerized controlled lathes, milling machines, laser engraver machines, low-temperature co-fired ceramics technology and 3D printers, highlighting their strong and weak points. In addition, some flow based methods exploiting innovative fluidic platforms are also presented as a way of example of the possible devices these tools can provide and their potential applications.

The UV-light emitting diode (LED) has been attracting significant attention as a new UV source that can replace conventional mercury gas-filled lamps in water disinfection applications. However, the UV-LED remains a relatively new addition to the water treatment toolbox. The current lack of fundamental understanding risks underutilizing uniquely advantageous features of the UV-LED due to unguided design and non-optimized disinfection practices. Our review presents the necessary fundamental knowledge required for the successful implementation of UV-LEDs, including the mechanism of light generation, LED chip fabrication, package design, and essential properties of UV-LEDs. We introduce distinct advantages, such as wavelength tuning, control of radiation patterns, and array design, while emphasizing the significant differences between LED and mercury lamp technologies required to achieve successful technology transfer. Previous studies investigated the design of UV-LED disinfection systems; however, little consensus has yet emerged regarding the integration of LEDs into flow-through reactors. While UV-LED disinfection systems will undisputedly mature in the near future, environmental engineers face a number of urgent research needs in this area including heat sink design, radiation pattern and array design optimization for uniform UV dose delivery, targeted pathogen-wavelength considerations, improved light extraction, and component monitoring systems.

Manufacturing high throughput in vitro models resembling the tissue microenvironment is highly demanded for studying bone regeneration. Tissues such as bone have complex multiscale architectures inside which cells reside. To this end, engineering a microfluidic platform incorporated with three-dimensional (3D) microscaffolds and submicron/nanoscale topographies can provide a promising model for 3D cell cultures. There are, however, certain challenges associated with this goal, such as the need to decorate large surfaces area with high-fidelity 3D submicron structures. Here, we succeeded in fabricating a microfluidic platform embedded with a large area (mm range) of reproducible submicron pillar-based topographies. Using the two-photon polymerization (2PP) as a 3D printing technique based on direct laser writing, uniform submicron patterns were created through optimization of the process parameters and writing strategy. To demonstrate the multiscale fabrication capabilities of this approach, submicron pillars of various heights were integrated onto the surfaces of a 3D microscaffold in a single-step 2PP process. The created submicron topography was also found to improve the hydrophilicity of the surface while being able to withstand flow rates of up to 8 mL/min. The material (IP-Dip resin) used for patterning did not have cytotoxic effects against human mesenchymal stromal cells after 3 days of dynamic culture in the microfluidic device. This proof-of-principle study, therefore, marks a significant step forward in manufacturing submicron structure-on-a-chip models for bone regeneration studies.

While chemically amplified resists (CARs) have been dominating the semiconductor industries over the past few decades, particularly in the area of computer chip fabrication, the replacement of such resists has been realized in recent times as the CARs are approaching their resolution limit, and thus may not be able to fulfil the market demand that the semiconductor industries are looking for, particularly for sub-20 nm node technology using next generation lithography techniques. In this context, non-chemically amplified resists (n-CARs) are being anticipated as potential replacements of CARs. In the case of n-CARs, the photosensitive functionality is integrated into the resist backbone. Therefore, upon exposure to photons of suitable energy, the photosensitive group undergoes photochemical changes resulting in polarity switching between the exposed and unexposed regions. This polarity change helps in developing patterns in the presence of a suitable developer. Therefore, external chemical amplification using photoacid generators (PAGs) is not needed to bring in required polarity changes in the case of n-CARs. As the n-CARs do not require any additional chemical amplification, they are devoid of the most serious problem that almost all CARs face i.e. acid diffusion in the solid state causing considerable line-edge roughness (LER) and line-width roughness (LWR). Recently, several research groups have designed and developed various n-CARs with ultra-low resolution and LER/LWR. Although many n-CARs, sensitive to photons of various energies, have been developed over the last few decades for larger nodes (>60 nm) the n-CARs development for patterning sub-30 nm features is at the plinth level. This review article will focus on the recent developments in the area of n-CARs for sub-30 nm node technology using next generation lithography (NGL) techniques.

The collapse-free joints were successfully built under a low reflowing temperature of 185 °C via using the Sn–Ag–Cu(-Ni)/Sn–Bi hybrid solders. Such a structure with middle and low melting points solders could prevent the infrastructure of 3D packages from collapse caused by overweight of stacked dies on substrates. Furthermore, a low bonding temperature could reduce the consumption of thermal budget during chip fabrication. By introducing Ni-doped Sn–Ag–Cu solder, the potential harm micro-Ag3Sn particles adjacent to the interfacial Cu6Sn5 layer in Sn–Ag–Cu/Sn–Bi/Cu joints were suppressed. Also, the microstructure of the hybrid joints was investigated in detail as well.

The world of integrated circuits is a very diverse and complex one. Many disciplines are involved in their development, including physics, design, photo lithography, process technology and packaging, to name a few. Electronic systems of today often include a variety of analog, digital, wireless (RF), memory and interface functions, which are more and more supported by modern chip fabrication processes.

Climate change and the depletion of fossil fuels urge us to switch to more renewable energy sources. There is more than enough sunlight to provide all the energy that we need. However, because the sun does not always shine, we need a way to store this energy for later use. Solar-to-hydrogen devices generate a fuel which can be stored, instead of electricity which has to be used directly when it is generated. This PhD thesis investigates the usefulness of microstructuring for such devices, microstructuring that is achieved with techniques that are also used for computer chip fabrication.

Cell-on-a-Chip (COC) can be utilized to get a preliminary analysis of the drug development for reducing the usage of experimental animals. Several strategies of surface modification in microchannel have been used to make the cells attach to the surface that increases the complexity of the COC chip fabrication. In the study, we propose a COC platform which has a reversible package design and a simple cell seeding process. Cells attach to a circular glass slide without any modification, and it provides the possibility of the duplex cells analysis in a chip. Using this COC platform, the function and harm of the new cancer drugs can be evaluated efficiently.

Nanofluidic devices are becoming increasingly critical for medical, chemical and biological applications. In this paper, a 2D Polycarbonate (PC) nanofluidic chip was fabricated by hot embossing and thermal bonding method. In this paper, the effect of the hot embossing parameters on the replication precision of 2D PC nanochannels was investigated by finite element method. To increase the bonding rate of the chip, the parameters of the thermal bonding process were optimized. Under the optimized parameters the 2D PC nanofluidic chip was successfully fabricated. The results show that the replication precision of the nanochannels can be as high as 97% and the bonding rate of the chip can be 96%. The fluorescent images demonstrate that there is no block and leakage through the whole microchannels and nanochannels. It is expected that this fabrication method has great potential to fabricate 2D nanofluidic chip with low cost and high precision.

Aerial image simulation is a fundamental problem in advanced lithography for chip fabrication. Since it requires a huge number of mathematical computations, an efficient yet accurate implementation becomes a necessity. In the literature, graphic processing unit (GPU) or multi-core single instruction multiple data (SIMD) CPU has demonstrated its potential for accelerating simulation. However, the combination of GPU and multi-core SIMD CPU was not exploited thoroughly. In this paper, we present and discuss collaborative computing algorithms for the aerial image simulation on multi-core SIMD CPU and GPU. Our improved method achieves up to 160× speedup over the baseline serial approach and outperforms the state-of-the-art GPU-based approach by up to 4× speedup with a hex-core SIMD CPU and Tesla K10 GPU. We show that the performance on the collaborative computing is promising, and the medium-grained task scheduling is suitable for improving the collaborative efficiency.

Two main groups of flow distributors, viz. "bifurcating distributors" (BF) and "radially interconnected distributors" (RI), as well as some hybrid distributors were investigated. Computational fluid dynamics was used to evaluate the performance of the distributors and to establish the design yielding the most uniform velocity field and the smallest variance for the bands emerging from the distributor. A minimum channel width of 100 mu m was considered to allow the use of micro-milling techniques for chip fabrication. The main factors that influenced the values of band variances were identified. The performance of the distributors was found to correlate most strongly with the volume of the flow distributors. The separation bed should be positioned immediately after, but not against the flow distributor. It was concluded that BF distributors perform best in terms of band variance. The values of band variances for the BF distributor decreased with increasing angle between bifurcation branches and the lowest value of about 0.01 mm(2) was found for alpha =175 degrees. Both BF and RI flow distributors were found to perform reasonably well when imperfections were present in the structure. However, severe blockages (exceeding 75% of the cross-sectional area and length) of channels in, especially, BF flow distributors may jeopardize their performance. (C) 2015 Elsevier B.V. All rights reserved.

The aim of the development of ASIC v3 was to implement the ROIC functionality of the SMARTImplant system using ultra-thin chip fabrication technologies. As presented in Chapter 2, the flexible substrate model of the implant was designed so as to have only a flexible sensor electrode tip implanted inside the body and the rest of the implant electronics placed on the circular pad outside. One of the most important issues with this setup is the resistance of the wires between the electrodes and the readout chip, which have a length of almost 12 cm.

A rapid development has been witnessed since the birth of this miniaturized analytical equipment about forty years ago. And microfluidics, a discipline studying the manipulation and analysis of micro volume sample is also attracting the attention of academics with the annually increasing publications. At present, microfluidic device has become a powerful platform with diverse functions implicated in the fields of cellular biology, environmental study, food safety monitoring and micro synthesis, and has crossed the barrier of academic study into the daily life of normal customers. In this chapter, we will focus on several aspects concerning the design and fabrication of microfluidic devices, such as the development of device material, different methods of chip fabrication and functional units to realize purpose of intention. And in the end of this part, a brief future perspective is given to evaluate the potential applications of microfluidic device, especially with other portal devices like smart phone.

This presentation covers chip fabrication services on SOI devices in Japanese universities, and demonstrate ultra-low energy cryptographic engine design as an example of SOI chip fabrication. VLSI Design and Education Center (VDEC) has established in 1996 as a inter-university facility at the University of Tokyo. VDEC provides chip fabrication services, major EDA tools, and seminars for chip designs to Japanese universities for academic purposes. Through the VDEC activities, we have provided several chip fabrication services on SOI, including 0.15um FDSOI, 0.6um SOI, 0.35um BiCMOS SOI, 28nm FDSOI, and 65nm FDSOI. As a design example of 65nm FDSOI, namely, SOTB, This presentation will describe ultra-low energy ECDSA design.

In the paper, the microaquarium fabricated in a form of entirely glass lab-on-a-chip for culturing and microscale study of microorganisms has been presented. A new approach towards cellular studies that brings a significant improvement over commonly utilized - polymer-based solutions has been shown. For the first time, all-borosilicate glass chip was applied for the culturing of the selected microorganisms and enabled notable population growth and behaviorism investigation. The chip fabrication method in comparison to typical glass chip technology was notably simplified, including quick patterning and low temperature bonding in 80 °C. In the studies, both a single-cell (Euglena gracilis and Euglena viridis) and multi-cell microorganisms (Lepadella patella) were cultured in the microaquarium. Behaviorism of the selected microorganisms was investigated by supplying various proportions of carbon dioxide, nitrogen and air into the chip. Tests included studies of microorganisms chemotaxis, viability (mostly based on photosynthesis process) and coexistence in the lab-on-a-chip environment. The experiments confirmed that the developed chip is a tool that fits the requirements for the culturing and behavioral studies of microorganisms and constitute ground-works to propel its further application in broadly defined cellular study field.

To improve the efficiency of nano-electronic device fabrication, a new method named floating electrical potential assembly is proposed to realize large-scale assembly of Cu/CuO nanowires. The simulation of floating electrical potential distribution on the micro-electrode chip is performed by COMSOL software, and the simulation result shows that the coupled electrical potential on the floating drain electrodes is very close to the original electrical potential applied on the gate electrode, which means that the method can provide di-electrophoresis (DEP) force for all the electrode pairs at one time, thus realizing large-scale assembly at one time. With Cu/CuO nanowires well dispersed and micro-electrode chip fabrication, nanowires assembly experiments are performed and the experimental results show that Cu/CuO nanowires are assembled at hundreds of micro-electrodes pairs at one time, and the success rate of nanowires assembly also reaches 90%.

This work was supported by the Samsung Research Funding Center of Samsung Electronics under Project Number SRFC-IT1601-01. The chip fabrication and EDA tool were supported by the IC Design Education Center (IDEC), Republic of Korea.