Search

Your search keyword '"Bo-Jheng Shih"' showing total 1 results
Start Over Author "Bo-Jheng Shih" Topic chemistry.chemical_element
1 results on '"Bo-Jheng Shih"'

1. Crystal-Orientation-Tolerant Voltage Regulator using Monolithic 3D BEOL FinFETs in Single-Crystal Islands for On-Chip Power Delivery Network

Author

Tzung-Han Tsai, Wen-Kuan Yeh, Chenming Hu, Yun-Ping Lan, Chang-Hong Shen, Chih-Chao Yang, Po-Tsang Huang, Kuan-Neng Chen, Bo-Jheng Shih, Yu-Wei Liu, Jia-Min Shieh, Da-Chiang Chang, Kuan-Fu Lai, and Ping-Yi Hsieh

Subjects
Power gating, Materials science, Silicon, business.industry, chemistry.chemical_element, Voltage regulator, Pulsed laser deposition, Crystal, chemistry, Optoelectronics, Field-effect transistor, business, Single crystal, Electronic circuit
Abstract

A single-crystal-island (SCI) technique is demonstrated using low thermal budget pulse laser process to fabricate single-crystal islands for monolithic 3D back-end-of-line (BEOL) FinFET circuits. The single-crystallinity are verified with SECCO etch, HREM, TEM, and EBSD. BEOL FinFETs fabricated in the designed single-crystal Si islands exhibit excellent electrical performance and low intra-island variability. To mitigate the effects of island-to-island device variation due to random island crystal orientations, crystal-orientation-tolerant voltage regulator is further proposed by allocating power gating (PG) cells among multiple Si islands, and 42% power noise suppression can be achieved.

Published
2020

Catalog

Books, media, physical & digital resources
See catalog results